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1. WO2007095132 - METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

Publication Number WO/2007/095132
Publication Date 23.08.2007
International Application No. PCT/US2007/003600
International Filing Date 09.02.2007
IPC
B01D 53/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
CPC
B01D 2257/2066
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
2257Components to be removed
20Halogens or halogen compounds
206Organic halogen compounds
2066Fluorine
B01D 53/8662
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
86Catalytic processes
8659Removing halogens or halogen compounds
8662Organic halogen compounds
C01B 7/20
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
7Halogens; Halogen acids
19Fluorine; Hydrogen fluoride
20Fluorine
Y02C 20/30
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
20Capture or disposal of greenhouse gases
30of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Y02P 20/151
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
20Technologies relating to chemical industry
151Reduction of greenhouse gas [GHG] emissions, e.g. CO2
Applicants
  • APPLIED MATERIALS, INC. [US]/[US] (AllExceptUS)
Inventors
  • RAOUX, Sebastien
  • LIN, Kuo-Chen
  • VERMEULEN, Robert, M.
  • CLARK, Daniel, O.
  • TSU, Stephen
  • MOALEM, Mehran
  • FOX, Allen
  • MCINTOSH, Monique
  • PUTZ, Joshua
  • RIESKE, Eric
  • LEE, Poh Soh
Agents
  • DUGAN, Brian, M.
Priority Data
60/772,31711.02.2006US
60/865,34710.11.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
(FR) PROCÉDÉS ET APPAREIL PERMETTANT DE SUPPRIMER LES PFC AU MOYEN D'UNE CHAMBRE D'OXYDATION PAR DÉCOMPOSITION CONTRÔLÉE
Abstract
(EN)
In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perf luorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.
(FR)
Dans au moins un aspect, l'invention concerne un système d'oxydation par décomposition contrôlée (CDO) qui permet de supprimer les perfluorocarbones (PFC). Ce système comprend (1) une partie amont comprenant un premier conduit conçu pour acheminer un flux de déchets gazeux; (2) une chambre de réaction thermique dotée d'une entrée couplée au premier conduit, d'un lit de catalyse conçu pour supprimer les PFC et d'une sortie; et (3) une partie aval comprenant un second conduit doté d'une première extrémité couplée à la sortie de la chambre de réaction thermique et comprenant une partie, en aval de la première extrémité, disposée à proximité du premier conduit. Le second conduit est conçu pour acheminer un flux de déchets gazeux dans la chambre de réaction thermique de façon à rendre possible un transfert d'énergie thermique entre le second conduit et le premier conduit afin de préchauffer le flux de déchets gazeux dans le premier conduit. L'invention concerne également de nombreux autres aspects.
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