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Pub. No.:    WO/2007/094848    International Application No.:    PCT/US2006/046810
Publication Date: 23.08.2007 International Filing Date: 07.12.2006
G03F 7/075 (2006.01), G03F 7/09 (2006.01)
Applicants: DOW CORNING CORPORATION [US/US]; 2200 West Salzburg Road, Midland, MI 48686-0994 (US) (For All Designated States Except US).
FU, Peng-fei [US/US]; (US) (For US Only).
MOYER, Eric, Scott [US/US]; (US) (For US Only)
Inventors: FU, Peng-fei; (US).
MOYER, Eric, Scott; (US)
Agent: BRADY, Sharon, K.; Dow Corning Corporation, Ip Department - CO1232, 2200 West Salzburg Road, Midland, MI 48686-0994 (US)
Priority Data:
60/772,619 13.02.2006 US
Abstract: front page image
(EN)Antireflective coatings comprising (i) a silsesquioxane resin having the formula (PhSiO (3-x) /2 (OH) x) mHSiO (3-x) /2 (OH) x) n (MeSiO (3-x) /2 (OH) x) p where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2; m has a value of 0.01 to 0.99, n has a value of 0.01 to 0.99, p has a value of 0.01 to 0.99, and m + n + p = 1; (ii) a polyethylene oxide fluid; and (iii) a solvent; and a method of forming said antireflective coatings on an electronique device.
(FR)L'invention concerne des revêtements antiréflecteurs comprenant (i) une résine de silsesquioxane de formule (PhSiO(3-x)/2(OH)x)mHSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p, dans laquelle Ph est un groupement phényle, Me est un groupement méthyle, x a une valeur de 0, 1 ou 2; m a une valeur comprise entre 0,01 et 0,99, n a une valeur comprise entre 0,01 et 0,99, p a une valeur comprise entre 0,01 et 0,99, et m + n + p ≈ 1; (ii) un fluide d'oxyde de polyéthylène; et (iii) un solvant.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)