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Machine translation
1. (WO2007091686) LAMINATE, THIN FILM SENSOR, THIN FILM SENSOR MODULE, AND METHOD FOR MANUFACTURING THE THIN FILM SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/091686    International Application No.:    PCT/JP2007/052401
Publication Date: 16.08.2007 International Filing Date: 09.02.2007
IPC:
H01C 7/00 (2006.01), G01K 7/18 (2006.01), H01C 7/02 (2006.01)
Applicants: MITSUI MINING & SMELTING CO., LTD. [JP/JP]; 1-11-1, Osaki, Shinagawa-ku, Tokyo1418584 (JP) (For All Designated States Except US).
WADA, Mitsuhiro [JP/JP]; (JP) (For US Only).
IKEDA, Makoto [JP/JP]; (JP) (For US Only).
TOMONARI, Kenji [JP/JP]; (JP) (For US Only).
INOUE, Shinichi [JP/JP]; (JP) (For US Only).
SEKIMORI, Hideshi [JP/JP]; (JP) (For US Only)
Inventors: WADA, Mitsuhiro; (JP).
IKEDA, Makoto; (JP).
TOMONARI, Kenji; (JP).
INOUE, Shinichi; (JP).
SEKIMORI, Hideshi; (JP)
Agent: SUZUKI, Shunichiro; S.SUZUKI & ASSOCIATES, Gotanda Yamazaki Bldg. 6F, 13-6, Nishigotanda 7-chome, Shinagawa-ku Tokyo1410031 (JP)
Priority Data:
2006-032549 09.02.2006 JP
2006-094153 30.03.2006 JP
2006-104213 05.04.2006 JP
Title (EN) LAMINATE, THIN FILM SENSOR, THIN FILM SENSOR MODULE, AND METHOD FOR MANUFACTURING THE THIN FILM SENSOR
(FR) STRATIFIÉ, capteur de FILM MINCE, module CAPTEUR DE FILM MINCE, et procédé de fabrication du capteur de film mince
(JA) 積層体、薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法
Abstract: front page image
(EN)Provided is a laminate including an insulating substrate, and a temperature-sensitive resistor laminated on the insulating substrate and made of a crystal of a metal having a platinum group element as its main component. The laminate is characterized in that the ratio of the (111) plane of the crystal, which is oriented within 10 degrees with respect to the normal direction (ND direction), to the plane of the layer of the temperature-sensitive resistor, is 90 % or more. By controlling the orientation of the crystals constituting the temperature sensitive resistor, there are provided a laminate suitable as a thin film sensor, a thin film sensor made of the laminate, a thin film sensor module having the thin film sensor, and a method for manufacturing the thin film sensor.
(FR)L'invention concerne un stratifié comprenant un substrat isolant, et une résistance sensible à la température stratifiée sur le substrat isolant, faite d'un cristal d'un métal présentant un élément de groupe platine comme principal composant. Le stratifié est caractérisé en ce que le rapport du (111) plan du cristal, qui est orienté à moins de 10 degrés par rapport à la direction normale (direction ND), et du plan de la couche de la résistance sensible à la température est supérieur ou égal à 90 %. En régulant l'orientation des cristaux constituant la résistance sensible à la température, on obtient un stratifié adéquat comme capteur de film mince, un capteur de film mince composé du stratifié, un module capteur de film mince présentant le capteur de film mince, et un procédé de fabrication du capteur de film mince.
(JA) 本発明の積層体は、  絶縁基板と、該絶縁基板上に積層された、白金族元素を主成分とする金属の結晶からなる感温抵抗体とを有し、  前記感温抵抗体の層の面垂直方向(ND方向)に対して10°以内に配向している前記結晶の(111)面の割合が、90%以上である ことを特徴としている。  本発明によれば、感温抵抗体を構成する結晶の配向性を制御することにより、薄膜センサとして好適な積層体、該積層体からなる薄膜センサ、該薄膜センサを有する薄膜センサモジュール、および該薄膜センサの製造方法が提供される。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)