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Machine translation
1. (WO2007091100) METHOD OF TREATING A GAS STREAM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/091100    International Application No.:    PCT/GB2007/050012
Publication Date: 16.08.2007 International Filing Date: 12.01.2007
IPC:
B01D 53/68 (2006.01)
Applicants: EDWARDS LIMITED [GB/GB]; Manor Royal, Crawley, West Sussex RH10 9LW (GB) (For All Designated States Except US).
SEELEY, Andrew James [GB/GB]; (GB) (For US Only).
SMITH, James Robert [GB/GB]; (GB) (For US Only)
Inventors: SEELEY, Andrew James; (GB).
SMITH, James Robert; (GB)
Agent: BOOTH, Andrew Steven; Edwards Limited, Manor Royal, Crawley, West Sussex RH10 2LW (GB)
Priority Data:
0602506.8 08.02.2006 GB
Title (EN) METHOD OF TREATING A GAS STREAM
(FR) PROCEDE DE TRAITEMENT D'UN FLUX DE GAZ
Abstract: front page image
(EN)A method is described for controlling the efficiency of an abatement system for treating a gas stream, in which a portion of the gas stream is diverted away from a plasma abatement device for removing a perfluorinated species from the gas stream, and returned to the gas stream upstream from the abatement device as a purge gas for a vacuum pump. This can reduce both the power requirement of the abatement device and the amount of inert gas added to the gas stream to make up the purge gas.
(FR)L'invention concerne un procédé de régulation du rendement d'un système de neutralisation destiné à traiter un flux de gaz, dans lequel une partie du flux de gaz est déviée à l'écart d'un dispositif de neutralisation à plasma destiné à éliminer une espèce perfluorée du flux de gaz, et renvoyée dans le flux de gaz en amont du dispositif de neutralisation pour faire office de gaz de purge d'une pompe à vide. Ceci peut réduire à la fois la consommation d'énergie du dispositif de neutralisation et la quantité de gaz inerte ajouté au flux de gaz pour constituer le gaz de purge.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)