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Pub. No.:    WO/2007/088420    International Application No.:    PCT/IB2006/003664
Publication Date: 09.08.2007 International Filing Date: 18.12.2006
C30B 25/10 (2006.01), F27B 14/06 (2006.01)
Applicants: LPE S.P.A. [IT/IT]; Via Dei Giovi, 7, I-20021 Baranzate (IT) (For All Designated States Except US).
VALENTE, Gianluca [IT/IT]; (IT) (For US Only).
MACCALLI, Giacomo, Nicolao [IT/IT]; (IT) (For US Only).
CRIPPA, Danilo [IT/IT]; (IT) (For US Only).
PRETI, Franco [IT/IT]; (IT) (For US Only)
Inventors: VALENTE, Gianluca; (IT).
MACCALLI, Giacomo, Nicolao; (IT).
CRIPPA, Danilo; (IT).
PRETI, Franco; (IT)
Agent: DE ROS, Alberto; Industrial Property Counsellor, Via Michelangelo 53, I-22071 Cadorago (MI) (IT)
Priority Data:
MI2005A002498 28.12.2005 IT
Abstract: front page image
(EN)The present invention relates to a reaction chamber (1) for an epitaxial reactor, provided with walls delimiting an inner cavity (10), specifically a lower wall (3) and an upper wall (2) and at least two side walls (4,5); the lower wall (3) and the upper wall (2) have different configurations and/or arc made of different materials; this allows the lower wall (3) to be heated to a higher temperature than the upper wall (2). The present invention also relates to a method for heating a reaction chamber.
(FR)L'invention porte sur une chambre de réaction (1) de réacteur épitaxial dont les parois inférieure (3), supérieure (2) et latérales (4, 5) délimitent la cavité intérieure (10). Les parois inférieure (3) et supérieure (2) ont des forme différentes et/ou sont faites de matériaux différents, ce qui permet de chauffer la paroi inférieure (3) à une température supérieure à celle de la paroi supérieure (2). L'invention porte également sur le procédé de chauffage d'une telle chambre.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: Italian (IT)