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1. WO2007087209 - METHODS AND APPARATUS FOR ION BEAM ANGLE MEASUREMENT IN TWO DIMENSIONS

Publication Number WO/2007/087209
Publication Date 02.08.2007
International Application No. PCT/US2007/001204
International Filing Date 17.01.2007
IPC
H01J 37/244 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
244Detectors; Associated components or circuits therefor
H01J 37/304 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
304Controlling tubes by information coming from the objects, e.g. correction signals
CPC
G01B 15/00
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
15Measuring arrangements characterised by the use of wave or particle radiation
H01J 2237/2446
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
244Detection characterized by the detecting means
2446Position sensitive detectors
H01J 2237/24507
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
245Detection characterised by the variable being measured
24507Intensity, dose or other characteristics of particle beams or electromagnetic radiation
H01J 2237/24528
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
245Detection characterised by the variable being measured
24507Intensity, dose or other characteristics of particle beams or electromagnetic radiation
24514Beam diagnostics including control of the parameter or property diagnosed
24528Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
H01J 2237/24578
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
245Detection characterised by the variable being measured
24571Measurements of non-electric or non-magnetic variables
24578Spatial variables, e.g. position, distance
H01J 2237/31701
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
30Electron or ion beam tubes for processing objects
317Processing objects on a microscale
31701Ion implantation
Applicants
  • VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US]/[US] (AllExceptUS)
  • CUMMINGS, James J. [US]/[US] (UsOnly)
  • OLSON, Joseph [US]/[US] (UsOnly)
  • CLOUGH, Arthur H. [US]/[US] (UsOnly)
  • HERMANSON, Eric [US]/[US] (UsOnly)
  • MOLLICA, Rosario [UY]/[US] (UsOnly)
  • MURPHY, Paul J. [US]/[US] (UsOnly)
  • DONAHUE, Mark [US]/[US] (UsOnly)
Inventors
  • CUMMINGS, James J.
  • OLSON, Joseph
  • CLOUGH, Arthur H.
  • HERMANSON, Eric
  • MOLLICA, Rosario
  • MURPHY, Paul J.
  • DONAHUE, Mark
Agents
  • FABER, Scott R.
Priority Data
11/336,46620.01.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHODS AND APPARATUS FOR ION BEAM ANGLE MEASUREMENT IN TWO DIMENSIONS
(FR) PROCÉDÉS ET APPAREIL POUR LA MESURE D'ANGLE DE FAISCEAU IONIQUE EN DEUX DIMENSIONS
Abstract
(EN)
An angle measurement system (100) for an ion beam includes a flag (120) defining first (140) and second features (142), wherein the second feature has a variable spacing from the first feature, a mechanism (122) to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam (62), and a sensing device (123, 124) to detect the ion beam for different flag positions along the translation path and produce a sensor signal in response to the detected ion beam. The sensor signal and corresponding positions of the flag are representative of a vertical beam angle of the ion beam in a vertical plane. The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.
(FR)
Selon l'invention, un système de mesure d'angle (100) pour faisceau ionique comprend un drapeau (120) définissant une première (140) et une seconde (142) caractéristique, la seconde caractéristique présentant un espacement variable à partir de la première caractéristique, un système (122) servant à translater le drapeau le long d'une voie de translation, de manière que le drapeau intercepte au moins une partie du faisceau ionique (62), et un dispositif de détection (123, 124) conçu pour détecter le faisceau ionique à différents emplacements du drapeau le long de ladite voie et produire un signal de détecteur en réponse au faisceau ionique détecté. Ce signal de détecteur et les emplacements correspondants du drapeau sont représentatifs d'un angle de faisceau vertical du faisceau ionique dans un plan vertical. Le dispositif de détection peut comporter un masque et un système servant à translater le masque en vue de définir un détecteur actuel de faisceau sur une partie d'un capteur à effet Faraday.
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