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Pub. No.:    WO/2007/086489    International Application No.:    PCT/JP2007/051224
Publication Date: 02.08.2007 International Filing Date: 26.01.2007
G01L 1/14 (2006.01), G01L 9/00 (2006.01), H01L 29/84 (2006.01)
Applicants: ALPS ELECTRIC CO., LTD. [JP/JP]; 1-7, Yukigaya otsukamachi, Ota-ku, Tokyo 1458501 (JP) (For All Designated States Except US).
TAMURA, Manabu [JP/JP]; (JP) (For US Only).
ABE, Akihiro [JP/JP]; (JP) (For US Only)
Inventors: TAMURA, Manabu; (JP).
ABE, Akihiro; (JP)
Agent: AOKI, Hiroyoshi; 7F, Nibancho Cashew Bldg. 4-3, Niban-cho, Chiyoda-ku Tokyo 1020084 (JP)
Priority Data:
2006-020456 30.01.2006 JP
(JA) 静電容量型圧力センサ
Abstract: front page image
(EN)A fixed electrode (3) is formed on a silicon substrate (1) through an insulating layer (2). The fixed electrode (3) constitutes a plurality of comb teeth (3a) extending in the normal direction of the major surface of the silicon substrate (1), and containing regions (3b) into which the projecting portions of a movable electrode can be inserted freely. A movable electrode (6) is provided on the fixed electrode (3) through insulating layers (4, 5). The movable electrode (6) has a plurality of comb teeth (6a) projecting to the fixed electrode (3) side. The movable electrode (6) is displaced upwardly or downwardly by pressure and the comb teeth (6a) are inserted into the regions (3b) between the comb teeth (3a) of the fixed electrode (3). Consequently, the opposing area between the movable electrode (6) and the fixed electrode (3) is varied. Since S in the formula: C=ϵS/d varies in proportion to the pressure, the capacitance varies linearly.
(FR)Une électrode fixe (3) est formée sur un substrat en silicium (1) à travers une couche isolante (2). L’électrode fixe (3) constitue une pluralité de dents de peigne (3a) qui s’étendent dans la direction normale de la surface principale du substrat en silicium (1), et contiennent des régions (3b) dans lesquelles viennent se loger librement les parties protubérantes d’une électrode mobile (6). L’électrode mobile (6) est formée sur l’électrode fixe (3) à travers des couches isolantes (4, 5) et comporte une pluralité de dents de peigne (6a) qui font saillie du côté de l’électrode fixe (3). L’électrode mobile (6) se déplace vers le haut ou vers le bas par application d’une pression et les dents de peigne (6a) s’insèrent dans les régions (3b) entre les dents de peigne (3a) de l’électrode fixe (3), ce qui permet de faire varier la surface opposée entre l’électrode mobile (6) et l’électrode fixe (3). Dans le formule C = ϵS/d, S varie proportionnellement à la pression, si bien que la capacité C varie linéairement.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)