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1. (WO2007083965) APPARATUS FOR AUTOMATICALLY VENTING PHOTORESIST
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2007/083965 International Application No.: PCT/KR2007/000361
Publication Date: 26.07.2007 International Filing Date: 22.01.2007
IPC:
H01L 21/027 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
Applicants: HONG, Soon-Suk[KR/KR]; KR (UsOnly)
LEE, Sang-Don[KR/KR]; KR (UsOnly)
JEONG, Ho-Jeong[KR/KR]; KR (UsOnly)
KIM, Dong-Joo[KR/KR]; KR (UsOnly)
HWANG, Myung-Hwan[KR/KR]; KR (UsOnly)
SEMICON TECH GLOBAL LIMITED[KR/KR]; 619, SICOX TOWER 513-14, Sangdaewon-dong Jungwon-gu, Sungnam-si Gyunggido 462-120, KR (AllExceptUS)
Inventors: HONG, Soon-Suk; KR
LEE, Sang-Don; KR
JEONG, Ho-Jeong; KR
KIM, Dong-Joo; KR
HWANG, Myung-Hwan; KR
Agent: AN, Sang-Jeong; First&Forever & Customers 1106, Keum-San Building Yeoeuido-dong 17-1, Yeongdeungpo-gu Seoul 150-727, KR
Priority Data:
10-2006-000654020.01.2006KR
Title (EN) APPARATUS FOR AUTOMATICALLY VENTING PHOTORESIST
(FR) APPAREIL DE DÉGAZAGE AUTOMATIQUE DE PHOTORÉSINE
Abstract:
(EN) The present invention discloses an apparatus for automatically venting photoresist, including a control module having a plurality of nitrogen supply valves connected respectively to a plurality of nitrogen supply lines and opened and closed to supply nitrogen, and a plurality of air supply valves connected respectively to a plurality of air supply lines and opened and closed to supply the air, and switches connected to the control module through a cable, for opening and closing the plurality of nitrogen supply valves and the plurality of air supply valves.
(FR) La présente invention concerne un appareil de dégazage automatique de photorésine. Ledit appareil comprend un module de commande présentant une pluralité de vannes d'alimentation d'azote reliées respectivement à une pluralité de conduites d'alimentation d'azote et ouvertes et fermées pour alimenter l'azote, ainsi qu'une pluralité de vannes d'alimentation d'air reliées respectivement à une pluralité de conduites d'alimentation d'air et ouvertes et fermées pour alimenter l'air, ainsi que des commutateurs reliés au module de commande par l'intermédiaire d'un câble, permettant d'ouvrir et de fermer la pluralité de vannes d'alimentation d'azote et la pluralité de vannes d'alimentation d'air.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: Korean (KO)