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Machine translation
1. (WO2007082031) METHODS AND APPARATUS FOR PURGING A SUBSTRATE CARRIER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/082031    International Application No.:    PCT/US2007/000722
Publication Date: 19.07.2007 International Filing Date: 11.01.2007
IPC:
B23P 21/00 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, CA 95054 (US) (For All Designated States Except US)
Inventors: SHAH, Vinay K.; (US).
ENGLHARDT, Eric; (US).
HUDGENS, Jeffrey C.; (US).
ELLIOTT, Martin; (US)
Agent: DUGAN, Brian, M.; DUGAN & DUGAN, PC, Suite 309, 245 Saw Mill River Road, Hawthorne, NY 10532 (US)
Priority Data:
60/758,152 11.01.2006 US
Title (EN) METHODS AND APPARATUS FOR PURGING A SUBSTRATE CARRIER
(FR) PROCEDES ET APPAREIL DE PURGE D'UN CONVOYEUR A SUBSTRAT
Abstract: front page image
(EN)In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.
(FR)L'invention concerne, dans un premier aspect, un convoyeur à substrat comprenant une enceinte prévue pour pouvoir être scellée et pour renfermer au moins un substrat. Le convoyeur à substrat comprend un premier orifice débouchant dans l'enceinte et prévu pour admettre un écoulement de gaz dans l'enceinte tandis que le convoyeur à substrat est fermé. L'invention comporte de nombreux autres aspects.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)