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Machine translation
1. (WO2007081686) GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFICIENTS FOR GAS DISTRIBUTION SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2007/081686 International Application No.: PCT/US2007/000035
Publication Date: 19.07.2007 International Filing Date: 03.01.2007
IPC:
H01L 21/306 (2006.01)
Applicants: LARSON, Dean, J.[US/US]; US (UsOnly)
LAM RESEARCH CORPORATION[US/US]; 4650 Cushing Parkway Fremont, California 94538-6470, US (AllExceptUS)
Inventors: LARSON, Dean, J.; US
Agent: SKIFF, Peter, K.; Buchanan Ingersoll & Rooney PC P.O. Box 1404 Alexandria, Virginia 22313-1404, US
Priority Data:
11/329,17011.01.2006US
Title (EN) GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFICIENTS FOR GAS DISTRIBUTION SYSTEM
(FR) SECTION DE PERMUTATION DE GAZ COMPRENANT DES VANNES AYANT DES COEFFICIENTS DE FLUX DIFFÉRENTS POUR SYSTÈME DE DISTRIBUTION DE GAZ
Abstract: front page image
(EN) A gas switching system for a gas distribution system for supplying different gas compositions to a chamber, such as a plasma processing chamber of a plasma processing apparatus, is provided. The chamber can include multiple zones, and the gas switching section can supply different gases to the multiple zones. The switching section can switch the flows of one or more gases, such that one gas can be supplied to the chamber while another gas can be supplied to a by-pass line, and then switch the gas flows.
(FR) L'invention concerne un système de permutation de gaz pour système de distribution de gaz fournissant des compositions différentes de gaz à une chambre, telle qu'une chambre de traitement par plasma d'un appareil de traitement par plasma. La chambre peut comprendre des zones multiples et la section de permutation de gaz peut fournir des gaz différents aux zones multiples. La section de permutation peut permuter les flux d'un ou plusieurs gaz, de telle sorte qu'un gaz peut être fourni à la chambre tandis qu'un autre gaz peut être fourni à une ligne de dérivation, et ensuite permuter les flux de gaz.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SV, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)