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1. (WO2007081642) FLASH DEVICEWITH SHARED WORD LINES AND MANUFACTURING METHODS THEREOF

Pub. No.:    WO/2007/081642    International Application No.:    PCT/US2006/062188
Publication Date: Fri Jul 20 01:59:59 CEST 2007 International Filing Date: Sat Dec 16 00:59:59 CET 2006
IPC: H01L 21/8247
H01L 27/115
H01L 29/788
G11C 16/04
H01L 21/28
G11C 8/14
G11C 16/08
Applicants: SANDISK CORPORATION
HIGASHITANI, Masaaki
Inventors: HIGASHITANI, Masaaki
Title: FLASH DEVICEWITH SHARED WORD LINES AND MANUFACTURING METHODS THEREOF
Abstract:
Word lines of a NAND flash memory array are formed by concentric, rectangular shaped, closed loops that have a width of approximately half the minimum feature size of the patterning process used. The resulting circuits have word lines linked together so that peripheral circuits are shared. Separate erase blocks are established by shield plates.