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1. WO2007035659 - METHOD AND APPARATUS FOR MEASURING A CHARACTERISTIC OF A SAMPLE FEATURE

Publication Number WO/2007/035659
Publication Date 29.03.2007
International Application No. PCT/US2006/036331
International Filing Date 18.09.2006
IPC
G01B 5/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
02for measuring length, width, or thickness
G01B 7/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
7Measuring arrangements characterised by the use of electric or magnetic means
02for measuring length, width, or thickness
G01B 11/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
G01B 13/02 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
13Measuring arrangements characterised by the use of fluids
02for measuring length, width, or thickness
G06F 15/00 2006.01
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
15Digital computers in general; Data processing equipment in general
CPC
G01Q 10/06
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
06Circuits or algorithms therefor
G01Q 30/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
04Display or data processing devices
G03F 7/70625
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70483Information management, control, testing, and wafer monitoring, e.g. pattern monitoring
70616Wafer pattern monitoring, i.e. measuring printed patterns or the aerial image at the wafer plane
70625Pattern dimensions, e.g. line width, profile, sidewall angle, edge roughness
Applicants
  • VEECO INSTRUMENTS, INC. [US]/[US] (AllExceptUS)
  • JAIN, Rohit [IN]/[IN] (UsOnly)
  • RICHARDS, John [US]/[US] (UsOnly)
Inventors
  • JAIN, Rohit
  • RICHARDS, John
Agents
  • DURST, Jay, G.
Priority Data
11/228,95716.09.2005US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD AND APPARATUS FOR MEASURING A CHARACTERISTIC OF A SAMPLE FEATURE
(FR) PROCÉDÉ ET APPAREIL DE MESURE D’UNE CARACTÉRISTIQUE D’UN ÉLÉMENT D'ÉCHANTILLON
Abstract
(EN)
An SPM based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature of interest, the maximum or minimum distance between those curves can be determined to ascertain a dimension of interest such as a maximum via width, a minimum line width, etc, The scan is preferably a relatively low-resolution scan in the Y direction, typically having 8-12 scan profiles passing through the feature of interest low-resolution, which is about half that typically used by prior techniques. The low-resolution scan can be performed relatively rapidly and with high repeatability. Repeatability is also higher than with prior techniques, and the level of repeatability is relatively insensitive to the resolution in the Y direction. Using a low-resolution scan also significantly reduces tip wear and increases throughput when compared to high-resolution scans.
(FR)
Une technique de mesure à base SPM permettant de mesurer des éléments superficiels d’un échantillon fait rentrer une courbe dans une famille de points limitrophes types acquis à la suite d’un balayage SPM de l'élément superficiel. Si deux courbes rentrent sur des bords opposés de l'élément intéressant, la distance maximale ou minimale entre ces deux courbes peut être déterminée pour évaluer une dimension intéressante comme la largeur traversante maximale, une épaisseur de trait minimale, etc. Le balayage est de préférence un balayage de résolution relativement faible dans la direction Y, avec typiquement 8 à 12 profils de balayage passant par la faible résolution de l'élément intéressant, ce qui correspond à environ la moitié du nombre utilisé dans les techniques de l’art antérieur. Le balayage de faible résolution peut se dérouler assez rapidement et avec grande reproductibilité. La reproductibilité est également plus élevée qu’avec les techniques de l’art antérieur, et le niveau de reproductibilité est relativement insensible à la résolution dans la direction Y. L’utilisation d’un balayage de faible résolution peut également réduire de manière significative l’usure de la pointe et augmenter le rendement par rapport aux balayages de résolution élevée.
Also published as
EP06814880
EP6814880
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