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1. WO2007029134 - A METHOD OF MANUFACTURING A MEMS CAPACITOR MICROPHONE, SUCH A MEMS CAPACITOR MICROPHONE, A STACK OF FOILS COMPRISING SUCH A MEMS CAPACITOR MICROPHONE, AN ELECTRONIC DEVICE COMPRISING SUCH A MEMS CAPACITOR MICROPHONE AND USE OF THE ELECTRONIC DEVICE

Publication Number WO/2007/029134
Publication Date 15.03.2007
International Application No. PCT/IB2006/052947
International Filing Date 24.08.2006
IPC
B81C 99/00 2010.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
CPC
B01L 2200/10
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
B01L 2200/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
12Specific details about manufacturing devices
B01L 2300/0627
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
06Auxiliary integrated devices, integrated components
0627Sensor or part of a sensor is integrated
B01L 2300/0819
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0809rectangular shaped
0819Microarrays; Biochips
B01L 2300/0887
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0887Laminated structure
B01L 2300/123
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
12Specific details about materials
123Flexible; Elastomeric
Applicants
  • NXP B.V. [NL]/[NL] (AllExceptUS)
  • LANGEREIS, Geert [NL]/[DE] (UsOnly)
  • WEEKAMP, Johannes Wilhelmus [NL]/[DE] (UsOnly)
  • GIESBERS, Jacobus Bernardus [NL]/[DE] (UsOnly)
Inventors
  • LANGEREIS, Geert
  • WEEKAMP, Johannes Wilhelmus
  • GIESBERS, Jacobus Bernardus
Agents
  • RÖGGLA, Harald
Priority Data
05108276.609.09.2005EP
05108280.809.09.2005EP
06112903.721.04.2006EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) A METHOD OF MANUFACTURING A MEMS CAPACITOR MICROPHONE, SUCH A MEMS CAPACITOR MICROPHONE, A STACK OF FOILS COMPRISING SUCH A MEMS CAPACITOR MICROPHONE, AN ELECTRONIC DEVICE COMPRISING SUCH A MEMS CAPACITOR MICROPHONE AND USE OF THE ELECTRONIC DEVICE
(FR) PROCEDE DE FABRICATION DE MICROPHONE A CONDENSATEUR MEMS, EMPILEMENT DE FEUILLES COMPRENANT CE MICROPHONE A CONDENSATEUR MEMS, DISPOSITIF ELECTRONIQUE COMPRENANT CE MICROPHONE A CONDENSATEUR MEMS ET UTILISATION DE CE DISPOSITIF ELECTRONIQUE
Abstract
(EN)
The invention relates to a method of manufacturing a MEMS capacitor microphone and further to such MEMS capacitor microphone. With the method a MEMS capacitor microphone can be manufactured by stacking pre-processed foils (10) having a conductive layer (11a,11b) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the MEMS capacitor microphones are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities and membranes. This opens up the possibility of manufacturing MEMS capacitor microphone.
(FR)
L'invention concerne un procédé de fabrication d'un microphone à condensateur MEMS ainsi que ce même microphone. Le procédé de fabrication du microphone à condensateur MEMS peut consister à : empiler des feuilles prétraitées (10) pourvues d'une couche conductrice (11a, 11b) sur au moins un côté ; sceller les feuilles (10) ainsi empilées par application de chaleur et de compression ; et enfin, séparer les microphones à condensateur MEMS de l'empilement (S). Le prétraitement des feuilles (réalisé de préférence par faisceau laser) comprend une sélection des opérations suivantes : (A) laisser la feuille intacte ; (B) décoller localement la couche conductrice ; (C) retirer la couche conductrice et vaporiser partiellement la feuille (10) ; et enfin, (D) retirer à la fois la couche conductrice et la feuille (10), de manière à former des trous dans la feuille (10). En plus de cet empilement, il est possible de former des cavités et des membranes, ce qui offre par conséquent, la possibilité de fabriquer un microphone à condensateur MEMS.
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