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1. (WO2007022013) TRACKING QUALIFICATION AND SELF-OPTIMIZING PROBE MICROSCOPE AND METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/022013    International Application No.:    PCT/US2006/031512
Publication Date: 22.02.2007 International Filing Date: 11.08.2006
IPC:
G01B 5/28 (2006.01), G01Q 60/24 (2010.01)
Applicants: VEECO INSTRUMENTS INC. [US/US]; 100 Sunnyside Blvd., Suite B, Woodbury, New York 11797 (US) (For All Designated States Except US).
RICE, Alan, F. [US/US]; (US) (For US Only).
HUANG, Lin [CN/US]; (US) (For US Only)
Inventors: RICE, Alan, F.; (US).
HUANG, Lin; (US)
Agent: DURST, Jay, G.; Boyle Fredrickson Avenue, 840 North Plankinton Avenue, Milwaukee,WI 53203 (US)
Priority Data:
11/203,506 12.08.2005 US
Title (EN) TRACKING QUALIFICATION AND SELF-OPTIMIZING PROBE MICROSCOPE AND METHOD
(FR) QUALIFICATION DE LOCALISATION ET MICROSCOPE A SONDE AUTO-OPTIMISEE ET PROCEDE CORRESPONDANT
Abstract: front page image
(EN)A scanning probe microscope and method of operation for monitoring and assessing proper tracking between the tip and sample, as well as automating at least some aspects of AFM setup previously done manually. Preferably, local slopes corresponding to the acquired data are compared to determine a tracking metric that is self-normalizing.
(FR)L'invention concerne un microscope à sonde de balayage et un procédé d'utilisation destiné à réguler et attribuer un tracé propre entre la pointe et l'échantillon, ainsi qu'à automatiser au moins certains aspects de l'installation AFM préalablement réalisée manuellement. De préférence, des pentes locales correspondant aux données acquises sont comparées afin de déterminer une métrique de localisation autonormalisée.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)