Search International and National Patent Collections
Some content of this application is unavailable at the moment.
If this situation persists, please contact us atFeedback&Contact
1. (WO2007011121) PLASMA REACTOR HAVING MULTIPLE ANTENNA STRUCTURE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/011121 International Application No.: PCT/KR2006/002643
Publication Date: 25.01.2007 International Filing Date: 06.07.2006
IPC:
H05H 1/34 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
24
Generating plasma
26
Plasma torches
32
using an arc
34
Details, e.g. electrodes, nozzles
Applicants:
DMS CO., LTD. [KR/KR]; 4th Fl., Dreampia Bldg., 958-1 Youngtong-dong, Youngtong-ku Suwon-City, Kyungki-do 445-912, KR (AllExceptUS)
LEE, Weon-Mook [KR/KR]; KR (UsOnly)
Inventors:
LEE, Weon-Mook; KR
Agent:
YOU ME PATENT AND LAW FIRM; Seolim Bldg. 649-10, Yoksam-dong, Kangnam-ku Seoul 135-080, KR
Priority Data:
10-2005-006538119.07.2005KR
Title (EN) PLASMA REACTOR HAVING MULTIPLE ANTENNA STRUCTURE
(FR) REACTEUR A PLASMA POSSEDANT UNE STRUCTURE A ANTENNES MULTIPLES
Abstract:
(EN) A plasma reactor includes a chamber in which a wafer is treated by a plasma reaction, the chamber being provided at an upper portion with a cylindrical dielectric window, a multiple antenna structure disposed on upper and lower portions of the dielectric window to generate RF magnetic field and apply the RF magnetic field inside the chamber through the dielectric window, thereby generating RF electric field, and an RF electric power supply unit for allowing for a time variation of the magnetic field of the multiple antenna structure.
(FR) L'invention concerne un réacteur à plasma comprenant une chambre dans laquelle une plaquette est traitée par une réaction plasmique, la chambre étant équipée d'une partie supérieure munie d'une fenêtre diélectrique cylindrique, une structure à antennes multiples disposée sur les parties supérieures et inférieures de la fenêtre diélectrique afin de produire un champ magnétique RF et de l'appliquer dans la chambre à travers la fenêtre diélectrique générant ainsi un champ électrique RF, et une unité d'alimentation d'énergie électrique RF en vue de permettre une variation temporelle du champ magnétique dans la structure à antennes multiples.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: Korean (KO)
Also published as:
US20080210378CN101218859