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Machine translation
1. (WO2007010385) NEW ORGANIC BOTTOM ANTIREFLECTIVE POLYMER COMPOSITIONS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/010385    International Application No.:    PCT/IB2006/002041
Publication Date: 25.01.2007 International Filing Date: 19.07.2006
IPC:
C08G 18/66 (2006.01), C08G 18/38 (2006.01), G03F 7/09 (2006.01), C09D 175/04 (2006.01)
Applicants: AZ ELECTRONIC MATERIALS USA CORP. [US/US]; 70 Meister Avenue, Somerville, NJ 8876 (US) (For All Designated States Except US)
Inventors: YAO, Huirong; (US).
DING-LEE, Shuji; (US)
Priority Data:
11/184,593 19.07.2005 US
Title (EN) NEW ORGANIC BOTTOM ANTIREFLECTIVE POLYMER COMPOSITIONS
(FR) NOUVELLES COMPOSITIONS DE POLYMÈRES ORGANIQUES ANTIRÉFLÉCHISSANTES
Abstract: front page image
(EN)The present invention relates to bottom anti reflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.
(FR)La présente invention concerne des compositions de revêtement antiréfléchissantes, des polymères utiles dans la fabrication de telles compositions, et leur utilisation dans le traitement d'image par la formation d’une couche mince entre un substrat réfléchissant et un revêtement photosensible.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)