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Pub. No.:    WO/2007/009000    International Application No.:    PCT/US2006/027081
Publication Date: 18.01.2007 International Filing Date: 12.07.2006
H01L 21/00 (2006.01)
Applicants: FUJIFILM DIMATIX, INC. [US/US]; 109 Etna Road, Lebanon, NH 03766 (US) (For All Designated States Except US).
HIGGINSON, John A. [US/US]; (US) (For US Only).
ROCCHIO, Michael [US/US]; (US) (For US Only).
BIRKMEYER, Jeffrey [US/US]; (US) (For US Only).
DEMING, Stephen R. [US/US]; (US) (For US Only).
VON ESSEN, Kevin [US/US]; (US) (For US Only).
BIBL, Andreas [US/US]; (US) (For US Only).
GARDNER, Deane A. [US/US]; (US) (For US Only)
Inventors: HIGGINSON, John A.; (US).
ROCCHIO, Michael; (US).
BIRKMEYER, Jeffrey; (US).
DEMING, Stephen R.; (US).
VON ESSEN, Kevin; (US).
BIBL, Andreas; (US).
GARDNER, Deane A.; (US)
Agent: LEEDS BINDER, Brenda M.; Fish & Richardson PC, P.O. Box 1022, Minneapolis, MN 55440-1022 (US)
Priority Data:
60/699,437 13.07.2005 US
60/699,436 13.07.2005 US
Abstract: front page image
(EN)A cluster tool (100) is described including a main chamber (102), a load chamber (106), a fluid deposition chamber (108) and an environmental controller (110). The load chamber (106) is coupled to the main chamber (102) and configured to receive one or more substrates. The fluid deposition chamber (108) is coupled to the main chamber (102) and includes a fluid deposition device (307) configured to deposit fluid onto the one or more substrates. A robot (104) is included in the main chamber (102), the robot (104) configured to transfer the one or more substrates between the load chamber (106) and the fluid deposition chamber (108). The environmental controller (110) is configured to maintain a substantially autonomous environment within the cluster tool (100).
(FR)La présente invention concerne un outil multiple (100) comportant une chambre principale (102), une chambre de charge (106), une chambre de dépôt de fluide (108) et une unité de commande environnementale (110). La chambre de charge (106) est couplée à la chambre principale (102) et conçue pour recevoir un ou plusieurs substrats. La chambre de dépôt de fluide (108) est couplée à la chambre principale (102) et comprend un dispositif de dépôt de fluide (307) conçu pour déposer un fluide sur le ou les substrats. Un robot (104) est prévu dans la chambre principale, lequel robot (104) est chargé de transférer le ou les substrats de la chambre de charge (106) à la chambre de dépôt de fluide (108). L'unité de commande de l'environnement (110) est conçue pour maintenir un environnement substantiellement autonome à l'intérieur de l'outil multiple (100).
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)