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1. (WO2007008999) LOCALIZED SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS
Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China 12.07.2006200680025268.4
Republic of Korea 26.12.20071020077030395Granted: 23.04.2013
Japan 10.01.20082008521576
European Patent Office 11.01.20082006787040Published: 26.03.2008
Granted: 25.04.2018
GermanyWithdrawn: 15.01.2008