WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2007008999) LOCALIZED SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/008999    International Application No.:    PCT/US2006/027078
Publication Date: 18.01.2007 International Filing Date: 12.07.2006
IPC:
C04B 41/00 (2006.01), H01L 21/00 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; P.O. Box 450A, Santa Clara, CA 95052 (US) (For All Designated States Except US).
BHATNAGAR, Ashish [IN/US]; (US) (For US Only).
MURUGESH, Laxman [US/US]; (US) (For US Only).
GOPALAKRISHNAN, Padma [IN/US]; (US) (For US Only)
Inventors: BHATNAGAR, Ashish; (US).
MURUGESH, Laxman; (US).
GOPALAKRISHNAN, Padma; (US)
Agent: JANAH, Ashok, K.; Janah & Associates, P.C., 640 Delancey Street, Suite 106, San Francisco, CA 94107 (US)
Priority Data:
11/181,041 13.07.2005 US
Title (EN) LOCALIZED SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS
(FR) RECUIT SUPERFICIEL LOCALISE DE COMPOSANTS POUR CHAMBRES DE TRAITEMENT DE SUBSTRAT
Abstract: front page image
(EN)A substrate processing chamber component has a structural body with localized surface regions having annealed microcracks. The annealed microcracks reduce crack propagation and increase fracture resistance. In one method of manufacture, the structural body of the component is formed by conventional means, and a laser beam is directed onto localized surface regions of the body for a sufficient time to anneal the surface microcracks.
(FR)Cette invention concerne un composant de chambre de traitement de substrat comprenant un corps structurel pourvu de zones superficielles localisées comportant des microfissures recuites. Les microfissures recuites réduisent la propagation des fissures et augmentent la résistance à la rupture. Dans un procédé de fabrication, le corps structurel du composant est formé au moyen de procédés conventionnels, et un faisceau laser est dirigé sur les zones superficielles localisées du corps pendant une durée suffisante pour que les microfissures superficielles soit recuites.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)