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1. (WO2007008792) APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/008792 International Application No.: PCT/US2006/026725
Publication Date: 18.01.2007 International Filing Date: 10.07.2006
IPC:
H01J 37/302 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
302
Controlling tubes by external information, e.g. programme control
Applicants:
NEXGENSEMI HOLDINGS CORPORATION [US/US]; 30251 Golden Lantern, Suite E522 Laguna Niguel, California 92677-5993, US (AllExceptUS)
ZANI, Michael John [US/US]; US (UsOnly)
SCOTT, Jeffrey Winfield [US/US]; US (UsOnly)
BENNAHMIAS, Mark Joseph [US/US]; US (UsOnly)
MAYSE, Mark Anthony [US/US]; US (UsOnly)
Inventors:
ZANI, Michael John; US
SCOTT, Jeffrey Winfield; US
BENNAHMIAS, Mark Joseph; US
MAYSE, Mark Anthony; US
Agent:
DELANEY, Karoline A.; Knobbe, Martens, Olson & Bear, LLP 2040 Main Street, 14th Floor Irvine, California 92614, US
Priority Data:
60/697,78008.07.2005US
Title (EN) APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
(FR) APPAREIL ET PROCEDE DE FABRICATION DE FAISCEAU DE PARTICULES CONTROLE
Abstract:
(EN) A chamber (102 in Fig. 2) for exposing a workpiece to charged particles (101 in Fig. 2) includes a source, a collimator, a beam digitizer (230 in Fig. 2) downstream of the collimator configured to create a digital beam including groups of at least one charged particle (Fig. 3B and 5) by adjusting longitudinal spacing between the particles along the axis, a deflector (210 in Fig. 6A and 6B) downstream of the beam digitizer including a series of deflection stages disposed longitudinally along the axis to deflect the digital beams, and a workpiece stage downstream of the deflector configured to hold the workpiece.
(FR) L'invention concerne une chambre qui permet d'exposer une pièce à des particules chargées, laquelle chambre comprend: une source de particules chargées permettant de produire un flux de particules chargées; un collimateur configuré pour collimater et diriger le flux de particules chargées depuis la source de particules chargées le long d'un axe; un numériseur de faisceau en aval du collimateur, configuré pour créer un faisceau numérique comprenant des groupes composés d'au moins une particule chargée en ajustant l'écartement longitudinal entre les particules chargées le long de l'axe; un déflecteur en aval du numériseur de faisceau, comprenant une série d'étages déflecteurs disposés longitudinalement le long de l'axe afin de dévier les faisceaux numériques; et un étage de pièce en aval du déflecteur, configuré pour tenir la pièce.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
KR1020080070619EP2027594JP2009500858CN101248505IN1075/DELNP/2008