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1. (WO2007008764) CHEMICAL MIXING APPARATUS, SYSTEM AND METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/008764 International Application No.: PCT/US2006/026687
Publication Date: 18.01.2007 International Filing Date: 10.07.2006
IPC:
G05D 11/13 (2006.01) ,H01L 21/00 (2006.01)
G PHYSICS
05
CONTROLLING; REGULATING
D
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
11
Ratio control
02
Controlling ratio of two or more flows of fluid or fluent material
13
characterised by the use of electric means
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Applicants:
TRES-ARK, INC. [US/US]; 3709 Promontory Point Drive, Suite 114 Austin, Texas 78744, US (AllExceptUS)
ANDERSON, Gary, R. [US/US]; US (UsOnly)
FOWLER, Matt; US (UsOnly)
Inventors:
ANDERSON, Gary, R.; US
FOWLER, Matt; US
Agent:
MEYERTONS, HOOD, KIVLIN, KOWERT & GOETZEL, P.C.; DELUCA, Mark R.; Patent Agent P.o. Box 398 Austin, Texas 78767-0398, US
Priority Data:
11/177,93008.07.2005US
Title (EN) CHEMICAL MIXING APPARATUS, SYSTEM AND METHOD
(FR) APPAREIL, SYSTEME ET PROCEDE DE MELANGE CHIMIQUE
Abstract:
(EN) There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for 'one pass' blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
(FR) L'invention concerne un système et un procédé de formulation d'un mélange comprenant au moins deux composés chimiques. Dans un mode de réalisation, un algorithme sans rétroaction peut être utilisé pour contrôler le mélange cible. Un algorithme à boucle de commande fermée de rétroaction est ensuite utilisé pour un mélange multivariant. L'utilisation de cette approche permet d'obtenir un mélange rempli de manière continue et automatique et contrôlé. L'invention concerne également la capacité de commande via des algorithmes sans rétroaction et de rétroaction d'un mode de commande à réponse rapide permettant d'éliminer un récipient. Cette approche permet un mélange 'monopasse' sous contrôle. L'unité de commande active un système automatique de détection et de correction des défaillances, identifiant ainsi une maintenance nécessaire avant une panne. Si une panne se produit, la reconnaissance de signature permet une analyse et une correction rapides, maximisant ainsi la disponibilité de l'outillage.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)