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1. (WO2007008335) SAMPLE ORIENTATION SYSTEM AND METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/008335 International Application No.: PCT/US2006/023348
Publication Date: 18.01.2007 International Filing Date: 15.06.2006
Chapter 2 Demand Filed: 19.12.2006
IPC:
G01J 4/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
4
Measuring polarisation of light
Applicants:
J.A. WOOLLAM CO., INC. [US/US]; 645 M St. Lincoln, NE, US (AllExceptUS)
Inventors:
Agent:
WELCH, James, D.; 10328 Pinehurst Ave. Omaha, NE 68124, US
Priority Data:
11/177,20708.07.2005US
Title (EN) SAMPLE ORIENTATION SYSTEM AND METHOD
(FR) SYSTÈME ET PROCÉDÉ D’ORIENTATION D’ÉCHANTILLON
Abstract:
(EN) Systems and methodology for orienting vertical position and tilt of samples, applied in ellipsometer and the like systems.
(FR) La présente invention concerne un système et un procédé d’orientation de la position verticale et de l’inclinaison d’échantillons, appliqués à un ellipsomètre ou des appareils similaires.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP1902281