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1. (WO2007007782) MULTILAYER STRUCTURE AND METHOD FOR CLEANING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/007782    International Application No.:    PCT/JP2006/313831
Publication Date: 18.01.2007 International Filing Date: 12.07.2006
IPC:
C23C 26/00 (2006.01), B08B 3/12 (2006.01), C23C 14/08 (2006.01), C23C 16/40 (2006.01), C23C 28/04 (2006.01), H01L 21/3065 (2006.01)
Applicants: TOHOKU UNIVERSITY [JP/JP]; 1-1, Katahira 2-chome, Aoba-ku, Sendai-shi, Miyagi 9808577 (JP) (For All Designated States Except US).
NIHON CERATEC CO., LTD. [JP/JP]; 5, Ake-Dori 3-chome, Izumi-ku, Sendai-shi, Miyagi 9813206 (JP) (For All Designated States Except US).
OHMI, Tadahiro [JP/JP]; (JP) (For US Only).
TERAMOTO, Akinobu [JP/JP]; (JP) (For US Only).
MORINAGA, Hitoshi [JP/JP]; (JP) (For US Only).
KISHI, Yukio [JP/JP]; (JP) (For US Only).
OHTAKI, Hiromichi [JP/JP]; (JP) (For US Only).
TSUTAI, Yoshihumi [JP/JP]; (JP) (For US Only)
Inventors: OHMI, Tadahiro; (JP).
TERAMOTO, Akinobu; (JP).
MORINAGA, Hitoshi; (JP).
KISHI, Yukio; (JP).
OHTAKI, Hiromichi; (JP).
TSUTAI, Yoshihumi; (JP)
Agent: IKEDA, Noriyasu; The Third Mori Building 4-10, Nishishinbashi 1-chome Minato-ku, Tokyo 1050003 (JP)
Priority Data:
2005-206071 14.07.2005 JP
Title (EN) MULTILAYER STRUCTURE AND METHOD FOR CLEANING SAME
(FR) STRUCTURE MULTICOUCHE ET SON PROCÉDÉ DE NETTOYAGE
(JA) 多層構造体及びその洗浄方法
Abstract: front page image
(EN)It has been difficult to provide a large-sized ceramic member quickly and economically. A multilayer structure is produced by forming a ceramic film on a base which is made of a material that can be shaped comparatively easily. The ceramic film is formed by a plasma spraying method, CVD method, PVD method, sol-gel method or the like. Alternatively, the ceramic film may be formed by a method combined with a spray deposit film.
(FR)Selon l’invention, il a été difficile de proposer de manière rapide et économique un élément en céramique de grandes dimensions. Une structure multicouche est fabriquée en formant une pellicule de céramique sur une base constituée d’un matériau pouvant être formé relativement facilement. La pellicule de céramique est formée par un procédé de projection au plasma, un procédé CVD, un procédé PVD, un procédé sol-gel ou similaire. Dans une variante, la pellicule de céramique peut être formée par un procédé combiné à une pellicule de dépôt par pulvérisation.
(JA) 大型のセラミックス部材を迅速且つ経済的に提供することは困難な状況になっている。  比較的製作し易い材料によって形成された基材上に、セラミックス膜を製膜することによって多層構造体を構成する。セラミックス膜はプラズマ溶射、CVD、PVD或いは、ゾル・ゲル法等または溶射膜との組み合わせによる方法によって成膜される。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)