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Machine translation
1. (WO2007007533) TABLE FOR ADHERING SHEET
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2007/007533    International Application No.:    PCT/JP2006/312687
Publication Date: 18.01.2007 International Filing Date: 26.06.2006
IPC:
H01L 21/683 (2006.01)
Applicants: LINTEC CORPORATION [JP/JP]; 23-23, Honcho, Itabashi-ku Tokyo 1730001 (JP) (For All Designated States Except US).
KURITA, Tsuyoshi [JP/JP]; (JP) (For US Only).
YAMAGUCHI, Koichi [JP/JP]; (JP) (For US Only).
KOBAYASHI, Kenji [JP/JP]; (JP) (For US Only)
Inventors: KURITA, Tsuyoshi; (JP).
YAMAGUCHI, Koichi; (JP).
KOBAYASHI, Kenji; (JP)
Agent: YAMAGUCHI, Yoshio; 8th Floor, Izumi Building 4-17, Tsurumaki 1-chome Tama-shi, Tokyo 206-0034 (JP)
Priority Data:
2005-198808 07.07.2005 JP
2006-015782 25.01.2006 JP
Title (EN) TABLE FOR ADHERING SHEET
(FR) TABLE DE COLLAGE DE FEUILLE
(JA) シート貼付用テーブル
Abstract: front page image
(EN)A table (13) is provided for adhering an adhesive sheet (S) on an upper plane of a semiconductor wafer (W). The table (13) is composed of an outer table (51) and an inner table (52). The outer table (51) and the inner table (52) are arranged to move up and down through single axis robots (54, 56), respectively, and the inner table (52) is arranged to move up and down at the same time when the outer table (51) is moved up and down.
(FR)L’invention concerne une table (13) permettant de coller une feuille adhésive (S) sur un plan supérieur d’une galette semi-conductrice (W). La table (13) se compose d’une table externe (51) et d’une table interne (52). La table externe (51) et la table interne (52) sont disposées pour monter et descendre grâce à des robots à axe unique (54, 56), respectivement, et la table interne (52) est installée pour monter et descendre en même temps que la table externe (51).
(JA)not available
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)