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Pub. No.:    WO/2007/007532    International Application No.:    PCT/JP2006/312686
Publication Date: 18.01.2007 International Filing Date: 26.06.2006
H01L 21/683 (2006.01)
Applicants: LINTEC CORPORATION [JP/JP]; 23-23, Honcho, Itabashi-ku Tokyo 1730001 (JP) (For All Designated States Except US).
NONAKA, Hideaki [JP/JP]; (JP) (For US Only).
KOBAYASHI, Kenji [JP/JP]; (JP) (For US Only)
Inventors: NONAKA, Hideaki; (JP).
Agent: YAMAGUCHI, Yoshio; 8th Floor, Izumi Building, 4-17, Tsurumaki 1-chome, Tama-shi Tokyo 2060034 (JP)
Priority Data:
2005-198807 07.07.2005 JP
(JA) シート貼付装置
Abstract: front page image
(EN)A sheet adhering apparatus is provided with a sheet feeding unit (12) which includes a peel plate (22) for peeling an adhesive sheet (S) from a peeling sheet (PS), and a pressing roller (14) for pressing and adhering the adhesive sheet (S) to the wafer (W) supported by a table (13). The peel plate (22) is supported to move forward and backward by means of a cylinder (50). The initial position of the leading end of the peel plate (22) is adjusted to the front and rear in accordance with the size of the wafer (W) or the size of the table (13) which supports the wafer (W).
(FR)L’invention concerne un appareil de collage de feuille muni d’une unité d’alimentation de feuille (12) comprenant une plaque de séparation (22) afin de séparer une feuille adhésive (S) d’une feuille de séparation (PS), et d'un galet de pression (14) permettant de peser sur la feuille adhésive (S) et de la coller à la galette (W) supportée par une table (13). La plaque de séparation (22) est supportée pour avancer et reculer à l’aide d’un cylindre (50). La position initiale du bord d’attaque de la plaque de séparation (22) est réglée vers l’avant et vers l’arrière selon la taille de la galette (W) ou la dimension de la table (13) qui supporte la galette (W).
(JA)not available
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)