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1. (WO2007007531) SHEET ADHERING APPARATUS AND SHEET ADHERING METHOD
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/007531 International Application No.: PCT/JP2006/312685
Publication Date: 18.01.2007 International Filing Date: 26.06.2006
IPC:
H01L 21/683 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
リンテック株式会社 LINTEC CORPORATION [JP/JP]; 〒1730001 東京都板橋区本町23-23 Tokyo 23-23, Honcho, Itabashi-ku Tokyo 1730001, JP (AllExceptUS)
野中英明 NONAKA, Hideaki [JP/JP]; JP (UsOnly)
中田 幹 NAKATA, Kan [JP/JP]; JP (UsOnly)
小林賢治 KOBAYASHI, Kenji [JP/JP]; JP (UsOnly)
Inventors:
野中英明 NONAKA, Hideaki; JP
中田 幹 NAKATA, Kan; JP
小林賢治 KOBAYASHI, Kenji; JP
Agent:
山口義雄 YAMAGUCHI, Yoshio; 〒2060034 東京都多摩市鶴牧1丁目4番17号 いずみビル8F Tokyo 8th Floor, Izumi Building, 4-17, Tsurumaki 1-chome, Tama-shi Tokyo 2060034, JP
Priority Data:
2005-19880607.07.2005JP
Title (EN) SHEET ADHERING APPARATUS AND SHEET ADHERING METHOD
(FR) APPAREIL DE COLLAGE DE FEUILLE ET PROCÉDÉ DE COLLAGE DE FEUILLE
(JA) シート貼付装置及び貼付方法
Abstract:
(EN) A sheet adhering apparatus (10) is provided with a sheet feeding unit (12) for feeding an adhesive sheet (S) to a position where a plane of a semiconductor wafer (W) faces, and a pressing roller (14) for adhering the adhesive sheet (S) to the wafer (W) by applying a pressing force to the adhesive sheet (S). The sheet feeding unit (12) includes a tension measuring means (35) for measuring tension of the adhesive sheet (S) between a feeding head (49) and the pressing roller (14), and mixing of bubbles between the adhesive sheet (S) and the wafer (W), and wafer warping deformation after sheet adhesion are prevented by maintaining the tension fixed by the tension measuring means (35).
(FR) L’invention concerne un appareil de collage de feuille (10) muni d’une unité d'alimentation de feuille (12) permettant d'alimenter une feuille adhésive (S) en une position à laquelle fait face un plan de galette semi-conductrice (W), et d'un galet de pression (14) permettant de coller la feuille adhésive (S) à la galette (W) en appliquant une force de pression à la feuille adhésive (S). L’unité d'alimentation de feuille (12) comporte un moyen de mesure de tension (35) afin de mesurer la tension de la feuille adhésive (S) entre une tête d’injection (49) et le galet de pression (14), et le mélange de bulles entre la feuille adhésive (S) et la galette (W), tout comme le gauchissement de la galette après collage de la feuille sont évites en maintenant la tension fixée par le moyen de mesure de tension (35).
(JA) not available
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
KR1020080025700JP2007019239US20090065126CN101213647