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1. (WO2007006834) SYSTEM AND METHOD FOR THE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/006834 International Application No.: PCT/ES2006/000405
Publication Date: 18.01.2007 International Filing Date: 13.07.2006
IPC:
G01Q 10/06 (2010.01) ,G01Q 20/02 (2010.01)
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
10
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04
Fine scanning or positioning
06
Circuits or algorithms therefor
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
20
Monitoring the movement or position of the probe
02
by optical means
Applicants:
CONSEJO SUPERIOR DE INVESTIGACIONES CIENTÍFICAS [ES/ES]; Serrano 117 E-28006 Madrid, ES (AllExceptUS)
TAMAYO DE MIGUEL, Francisco Javier [ES/ES]; ES (UsOnly)
MERTENS, Johan [FR/FR]; FR (UsOnly)
CALLEJA GOMEZ, Montserrat [ES/ES]; ES (UsOnly)
Inventors:
TAMAYO DE MIGUEL, Francisco Javier; ES
MERTENS, Johan; FR
CALLEJA GOMEZ, Montserrat; ES
Agent:
UNGRÍA LÓPEZ, Javier; Avda. Ramón y Cajal, 78 E-28043 Madrid, ES
Priority Data:
EP 05380157.714.07.2005EP
Title (EN) SYSTEM AND METHOD FOR THE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES
(ES) SISTEMA Y MÉTODO PARA LA INSPECCIÓN DE ESTRUCTURAS MICRO Y NANOMECÁNICA
(FR) SYSTEME ET PROCEDE D'INSPECTION DE STRUCTURES MICRO ET NANOMECANIQUES
Abstract:
(EN) The invention relates to a system for the inspection of surfaces, which is configured to detect vibration and/or relative displacement characteristics at different points of various elements (51) forming part of a mechanical structure (5), such as a micro or nanomechanical structure. According to the invention, a light beam is moved by the mechanical structure along a first path (A) in order to detect different successive reference positions (C) along the length of said path (A) and the light beam is also moved by the mechanical structure along various secondary paths (B) which are each associated with one of the aforementioned reference positions (C). In addition, the invention relates to a corresponding method and a program for performing said method.
(ES) El sistema para la inspección de superficies está configurado para detectar características de desplazamiento relativo y/o de vibración de diversos puntos de varios elementos (51) que forman parte de una estructura mecánica (5), tal como una estructura micro o nanomecánica. Un haz de luz es desplazado por la estructura mecánica a lo largo de una primera trayectoria (A) para detectar varias posiciones de referencia subsiguientes (C) a lo largo de dicha trayectoria (A), y el haz de luz es desplazado, además, por la estructura mecánica a lo largo de varias segundas trayectorias (B), siendo asociada cada una de dichas segundas trayectorias (B) con una de dichas posiciones de referencia (C). Además, la invención se refiere a un correspondiente método y a un programa para la realización del método.
(FR) Le système d'inspection de surfaces selon l'invention est configuré pour détecter des caractéristiques de déplacement relatif et/ou de vibration de différents points de divers éléments (51) qui font partie d'une structure mécanique (5), telle qu'une structure micro ou nanomécanique. Selon l'invention, un faisceau lumineux se déplace dans la structure mécanique le long d'une première trajectoire (A) pour détecter différentes positions de référence successives (C) le long de ladite trajectoire (A), et le faisceau lumineux est également déplacé par la structure mécanique le long de différentes trajectoires secondaires (B), qui sont toutes associées à une desdites trajectoires secondaires (B) avec une desdites positions de références mentionnées auparavant (C). L'invention concerne également un procédé correspondant et à un programme permettant de mettre en oeuvre ledit procédé.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Spanish (ES)
Filing Language: Spanish (ES)
Also published as:
JP2009501327US20090207404CN101278357CA2626230