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1. (WO2007004782) PAD CONDITIONER AND ERROR DETECTING APPARATUS FOR THE SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/004782 International Application No.: PCT/KR2006/001058
Publication Date: 11.01.2007 International Filing Date: 23.03.2006
IPC:
H01L 21/304 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302
to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
304
Mechanical treatment, e.g. grinding, polishing, cutting
Applicants:
KIM, Oh Su [KR/KR]; KR
Inventors:
KIM, Oh Su; KR
Priority Data:
10-2005-005960504.07.2005KR
10-2005-012508119.12.2005KR
Title (EN) PAD CONDITIONER AND ERROR DETECTING APPARATUS FOR THE SAME
(FR) CONDITIONNEUR DE PATIN ET APPAREIL DE DÉTECTION D’ERREUR POUR LEDIT CONDITIONNEUR
Abstract:
(EN) Disclosed are a pad conditioner and an error detecting apparatus for the same. The pad conditioner according to the present invention includes a housing; a rotational body located on the inner side of the housing, in which a positioning portion is formed on the upper surface thereof; a rotational force transfer member engaged with the rotational body and connected to a drive unit for transferring a power; a rotational shaft engaged with the rotational force transfer member, to which a conditioning disc for optimizing a surface of a polishing pad for a semiconductor substrate is fixed; a nozzle for introducing air into a space portion formed in the interior of the rotational shaft; and a diaphragm cap for sealing the upper surface of the rotational body. A sealing member is provided between the rotational body and the rotational shaft. Further, the present invention provides an error detecting apparatus for detecting an error generated while conditioning the polishing pad of the pad conditioner.
(FR) L’invention concerne un conditionneur de patin et un appareil de détection d’erreur pour ledit conditionneur. Le conditionneur de patin selon la présente invention comprend un logement ; un corps rotatif situé sur le côté intérieur du logement, dans lequel une portion de positionnement est formée sur la surface supérieure de celui-ci ; un élément de transfert de force de rotation engagé dans le corps rotatif et connecté à une unité d’entraînement permettant de transférer de l’énergie ; un arbre de rotation engagé dans l’élément de transfert de force de rotation, auquel est fixé un disque de conditionnement permettant d’optimiser une surface d’un patin de polissage pour substrat semi-conducteur ; une buse permettant d’injecter de l’air dans un espace formé à l’intérieur de l’arbre de rotation ; et un capuchon de membrane pour étanchéifier la surface supérieure du corps rotatif. Un élément d’étanchéité est disposé entre le corps rotatif et l’arbre de rotation. En outre, la présente invention concerne un appareil de détection d’erreur permettant de détecter une erreur générée lors du conditionnement du patin de polissage du conditionneur de patin.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)