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1. (WO2007004551) CONTAINER TRANSPORTING APPARATUS AND CONTAINER TRANSPORTING SYSTEM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/004551 International Application No.: PCT/JP2006/313084
Publication Date: 11.01.2007 International Filing Date: 30.06.2006
Chapter 2 Demand Filed: 24.04.2007
IPC:
H01L 21/677 (2006.01) ,B65G 49/07 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
07
for semiconductor wafers
Applicants:
ローツェ株式会社 RORZE CORPORATION [JP/JP]; 〒7202104 広島県福山市神辺町字道上1588番地の2 Hiroshima 1588-2, Aza-Michinoue, Kannabe-cho, Fukuyama-shi, Hiroshima 7202104, JP (AllExceptUS)
崎谷 文雄 SAKIYA, Fumio [JP/JP]; JP (UsOnly)
Inventors:
崎谷 文雄 SAKIYA, Fumio; JP
Agent:
松下 亮 MATSUSHITA, Makoto; 〒1010032 東京都千代田区岩本町3丁目2-2 マルトモ東京ビル9階 Tokyo Marutomo Tokyo Bldg. 9F., 2-2, Iwamoto-cho 3-chome, Chiyoda-ku Tokyo 1010032, JP
Priority Data:
2005-19380401.07.2005JP
Title (EN) CONTAINER TRANSPORTING APPARATUS AND CONTAINER TRANSPORTING SYSTEM
(FR) APPAREIL DE TRANSPORT DE CONTENANTS ET SYSTEME DE TRANSPORT DE CONTENANTS
(JA) コンテナ搬送装置及びコンテナ搬送システム
Abstract:
(EN) Provided are a container transporting apparatus and a container transporting system which can suitably transport containers corresponding to a process speed, arrangement configuration and the like of a processing apparatus. The container transporting system is provided for transporting the container which stores substrates inside, and is provided with a plurality of container transporting apparatuses. The container transporting apparatus is provided with a transporting robot having a lifting means for lifting the container being held and a linearly shifting means; and a placing table for placing at least one container.
(FR) L’invention concerne un appareil de transport de contenants et un système de transport de contenants permettant de transporter de manière adéquate des contenants conformément à une vitesse de traitement, une configuration ou d’autres caractéristiques d’un appareil de traitement. Le système de transport de contenants sert à transporter un contenant à l’intérieur duquel sont stockés des substrats et est doté d’une pluralité d’appareils de transport de contenants. Chaque appareil de transport de contenants est doté d’un robot de transport comportant un moyen de levage servant à soulever le contenant retenu et un moyen de déplacement linéaire, et d’une table de placement servant à placer au moins un contenant.
(JA)  処理装置の処理速度や配置構成等に応じてコンテナを好適に搬送できるコンテナ搬送装置及びコンテナ搬送システムを提供する。  本願発明のコンテナ搬送システムは、内部に基板を収納するコンテナを搬送するものであって、保持した前記コンテナを昇降動作する昇降手段、及び、直線移動手段を備える搬送ロボットと、少なくとも1つのコンテナを載置する載置台と、からなるコンテナ搬送装置を複数備える。
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
KR1020080016614JP4615015CN101180719