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1. (WO2007003882) METHOD OF TREATING AN EXHAUST GAS
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CLAIMS

1. A method of inhibiting the accumulation of solid explosive material within a foreline for conveying a fluid stream comprising the explosive material in gaseous form from a processing chamber, said method comprising the steps of supplying to the fluid stream an oxidant for reacting with the explosive material to form non-explosive material, and inhibiting the migration of oxidant into the processing chamber.

2. A method according to Claim 1 , wherein the oxidant is supplied directly to the foreline.

3. A method according to Claim 1 or Claim 2, wherein the oxidant is
supplied to the foreline proximate to the processing chamber.

4. A method according to any preceding claim, wherein a pumping
mechanism is provided upstream from an oxidant inlet through which the oxidant is supplied to the fluid stream to inhibit the oxidant
migration into the processing chamber.

5. A method according to Claim 4, wherein the pumping mechanism
forms part of a vacuum pump located within the foreline and between the processing chamber and the oxidant inlet.

6. A method according to any of Claims 1 to 3, wherein an orifice is
provided in the foreline at a position upstream from an oxidant inlet through which the oxidant is supplied to the fluid stream to inhibit the oxidant migration into the processing chamber.

7. A method according to any preceding claim, wherein the oxidant is continuously supplied to the foreline.

8. A method according to any of Claims 1 to 6, wherein the oxidant is periodically supplied to the foreline.

9. A method according to any preceding claim, wherein the explosive material comprises a polymeric material.

10. A method according to Claim 9, wherein the explosive material
comprises a compound of at least silicon and chlorine.

11. A method according to any preceding claim, wherein the oxidant
comprises at least one of oxygen, ozone, air, fluorine, peroxide and water vapour.

12. A method according to any preceding claim, wherein the humidity of the oxidant is controlled.

13. A method_of treating a gas exhaust from a chamber, the exhaust gas comprising an explosive material in gaseous form, said method
comprising the steps of supplying to the exhaust gas an oxidant for reacting with the explosive material to form non-explosive material, and inhibiting the migration of oxidant into the chamber.

14. A system for inhibiting the accumulation of solid explosive material within a foreline for conveying a fluid stream comprising the explosive material in gaseous form from a processing chamber, the system
comprising means for supplying to the fluid stream an oxidant for
reacting with the explosive material to form non-explosive material, and means for inhibiting the migration of oxidant into the processing
chamber.

15. A system according to Claim 14, wherein the supply means is
configured to supply oxidant directly to the foreline.

16. A system according to Claim 14 or Claim 15, wherein the supply
means is configured to supply oxidant to the foreline proximate to the processing chamber.

17. A system according to any of Claims 14 to 16, wherein the isolating means comprises a pumping mechanism provided upstream from an oxidant inlet through which the oxidant is supplied to the fluid stream to inhibit the oxidant migration into the processing chamber.

18. A system according to Claim 17, wherein the pumping mechanism
forms part of a vacuum pump located within the foreline and between the processing chamber and the oxidant inlet.

19. A system according to any of Claims 14 to 16, wherein the isolating means comprises an orifice located in the foreline upstream from an oxidant inlet through which the oxidant is supplied to the fluid stream to inhibit the oxidant migration into the processing chamber.

20. A system according to any of Claims 14 to 19, wherein the oxidant comprises at least one of oxygen, ozone, air, peroxide and water
vapour.

21. A system for treating a gas exhaust from a chamber, the exhaust gas comprising an explosive material in gaseous form, said system
comprising means for supplying to the exhaust gas an oxidant for
reacting with the explosive material to form non-explosive material, and means for inhibiting the migration of oxidant into the chamber.