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1. (WO2007003862) VACUUM LINE AND METHOD FOR MONITORING SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/003862 International Application No.: PCT/FR2006/050673
Publication Date: 11.01.2007 International Filing Date: 04.07.2006
IPC:
F04B 37/14 (2006.01) ,F04B 37/08 (2006.01) ,F04B 51/00 (2006.01)
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
B
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37
Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/-F04B35/187
10
for special use
14
to obtain high vacuum
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
B
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37
Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/-F04B35/187
06
for evacuating by thermal means
08
by condensing or freezing, e.g. cryogenic pumps
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
B
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
51
Testing machines, pumps, or pumping installations
Applicants:
ALCATEL LUCENT [FR/FR]; 54 Rue la Bo├ętie F-75008 Paris, FR (AllExceptUS)
BECOURT, Nicolas [FR/FR]; FR (UsOnly)
Inventors:
BECOURT, Nicolas; FR
Agent:
EL MANOUNI, Josiane; COMPAGNIE FINANCIERE ALCATEL 54 Rue la Bo├ętie F-75008 Paris, FR
Priority Data:
055202704.07.2005FR
Title (EN) VACUUM LINE AND METHOD FOR MONITORING SAME
(FR) LIGNE DE VIDE ET PROCÉDÉ DE SURVEILLANCE D'UNE TELLE LIGNE
Abstract:
(EN) The invention concerns a vacuum line for pumping gases in a process chamber, comprising at least: a pumping unit including a pump housing and a motor, a system for discharging the gases, first means for measuring a functional parameter concerning the motor, second means for measuring a functional parameter concerning the discharge system, and means for predicting the duration of use of the vacuum line. The prediction means calculates the duration of use of the vacuum line prior to failure of the pumping unit, based on the measurement of the functional parameter concerning the motor supplied by the first means and on the measurement of a functional parameter concerning the discharge system supplied by the second means. In another embodiment, the vacuum line further comprises third means for measuring a functional parameter concerning the pump housing, and the prediction means calculates the duration of use taking into account the measurement of said parameter.
(FR) La présente invention a pour objet une ligne de vide pour le pompage des gaz dans une chambre de procédé, comportant au moins - un groupe de pompage comprenant un corps de pompe et un moteur, - un système d'évacuation des gaz, - un premier moyen de mesure d'un paramètre fonctionnel relatif au moteur, - un deuxième moyen de mesure d'un paramètre fonctionne! relatif au système d'évacuation, et - un moyen de prévision de la durée d'utilisation de la ligne de vide. Le moyen de prévision calcule la durée d'utilisation de la ligne de vide avant défaillance du groupe de pompage, à partir de la mesure d'un paramètre fonctionnel relatif au moteur fournie par le premier moyen et de la mesure d'un paramètre fonctionnel relatif au système d'évacuation fourni par le deuxième moyen. Selon une variante, la iigne de vide comporte en outre un troisième moyen de mesure d'un paramètre fonctionnel relatif au corps de pompe, et le moyen de prévision calcule la durée d'utilisation en tenant compte de la mesure de ce paramètre.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)
Also published as:
KR1020080031048EP1754888JP2008545088CN101213371FR2887938