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1. (WO2007003563) PROJECTION LIGHT FACILITY PROVIDED WITH A PLURALITY OF PROJECTIVE LENSES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/003563 International Application No.: PCT/EP2006/063663
Publication Date: 11.01.2007 International Filing Date: 28.06.2006
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
CARL ZEISS SMT AG [DE/DE]; Rudolf-Eber-Str. 2 73447 Oberkochen, DE (AllExceptUS)
DODOC, Aurelian [DE/DE]; DE (UsOnly)
ULRICH, Wilhelm [DE/DE]; DE (UsOnly)
FELDMANN, Heiko [DE/DE]; DE (UsOnly)
Inventors:
DODOC, Aurelian; DE
ULRICH, Wilhelm; DE
FELDMANN, Heiko; DE
Agent:
FRANK, Hartmut; Reichspräsidentenstr. 21-25 45470 Mülheim a.d. Ruhr, DE
Priority Data:
10 2005 030 839.201.07.2005DE
Title (DE) PROJEKTIONSBELICHTUNGSANLAGE MIT EINER MEHRZAHL VON PROJEKTIONSOBJEKTIVEN
(EN) PROJECTION LIGHT FACILITY PROVIDED WITH A PLURALITY OF PROJECTIVE LENSES
(FR) INSTALLATION D'ECLAIRAGE PAR PROJECTION COMPRENANT UNE PLURALITE D'OBJECTIFS DE PROJECTION
Abstract:
(DE) Die Erfindung betrifft eine Projektionsbelichtungsanlage (1) mit einer Mehrzahl von Projektionsobjektiven (10) , von denen jedes ein Objektfeld (50) in ein Bildfeld (60) abbildet. Die Bildfelder (60) sind in einem Substratbereich (40) in einer Substratebene angeordnet, wobei der Substratbereich (40) in einer vorbestimmten Scanrichtung (5) relativ zu der Mehrzahl von Projektionsobjektiven bewegbar ist, wobei wenigstens eines dieser Projektionsobjektive einen Teilabschnitt seiner optischen Achse aufweist, welcher nicht senkrecht zu der Substratebene verläuft und wobei die Projektion dieses Teilabschnitts in die Substratebene nicht parallel zur Scanrichtung (5) verläuft .
(EN) The invention relates to a projection light facility (1) comprising a plurality of projection objective lenses (10) for reproducing each object field (50) on the image field (60). The image fields (60) are located in a substrate area (40) on the substrate plane, wherein said substrate area (40) is displaceable in a predefined scanning direction (5) with respect to the plurality of projection objective lenses, at least one projection objective lens is provided with a partial section of the optical axis thereof which is not perpendicular to the substrate plane and the projection of said partial section on the substrate plane is not parallel to the scanning direction (5).
(FR) La présente invention concerne une installation d'éclairage par projection (1) comprenant une pluralité d'objectifs de projection (10) qui représentent chacun un champ objet (50) dans un champ image (60). Les champs image (60) se trouvent dans une zone de substrat (40) dans un plan de substrat. La zone de substrat (40) peut se déplacer dans une direction de balayage prédéfinie (5) par rapport à la pluralité d'objectifs de projection. Au moins un de ces objectifs de projection présente une section partielle de son axe optique qui n'est pas perpendiculaire au plan du substrat et la projection de cette section partielle dans le plan du substrat n'est pas parallèle à la direction de balayage (5).
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)
Also published as:
KR1020080022125JP2008545153JP2012168550KR1020120040755