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1. (WO2007003167) INITIAL WETTING AUXILIARY MATERIAL FOR A VAPORISER BODY
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/003167 International Application No.: PCT/DE2006/001123
Publication Date: 11.01.2007 International Filing Date: 30.06.2006
IPC:
C23C 14/24 (2006.01) ,C23C 14/20 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
14
Metallic material, boron or silicon
20
on organic substrates
Applicants:
SINTEC KERAMIK GMBH [DE/DE]; Ingenrieder Strasse 2a 86956 Schongau, DE (AllExceptUS)
GOETZ, Ulrich [DE/DE]; DE (UsOnly)
NÜRNBERGER, Michael [DE/DE]; DE (UsOnly)
Inventors:
GOETZ, Ulrich; DE
NÜRNBERGER, Michael; DE
Agent:
VIERING, Hans-Martin; Viering, Jentschura & Partner Grillparzerstr. 14 81675 München, DE
Priority Data:
10 2005 030 862.701.07.2005DE
Title (DE) ERSTBENETZUNGSHILFSMATERIAL FÜR EINEN VERDAMPFERKÖRPER
(EN) INITIAL WETTING AUXILIARY MATERIAL FOR A VAPORISER BODY
(FR) MATIERE AUXILIAIRE DE MOUILLAGE INITIAL POUR UN CORPS DE VAPORISATION
Abstract:
(DE) Erstbenetzungshilfsmaterial zum Aufbringen auf die Verdampferfläche eines elektrisch beheizbaren keramischen Verdampferkörpers (1), welcher zum Betreiben in einer PVD-Metallisierungsanlage zum Verdampfen von Aluminium vorgesehen ist und Stickstoff, insbesondere in Form von Bornitrid, als Materialkomponente enthält. Das Erstbenetzungshilfsmaterial weist Aluminium, welches nach dem Start des Betriebs des Verdampferkörpers (1) auf dessen Verdampferfläche schmilzt und im geschmolzenen Zustand mit dem Stickstoff des Verdampferkörpers (1) unter Ausbildung einer Aluminiumnitridschicht auf der Verdampferfläche reagiert, und ein Benetzungsmittel auf, mittels dessen eine gleichmäßige und großflächige Verteilung des geschmolzenen Aluminiums auf der Verdampferfläche begünstigt wird.
(EN) The invention relates to an initial wetting auxiliary material which is applied to the vaporiser surface of an electrically heatable ceramic vaporiser body (1), which is to be used in a PVD-metallisation installation to vaporise aluminium, and which contains nitrogen, in particular, in the form of boron nitride, as material components. The initial wetting auxiliary material comprises aluminium which melts on the vaporiser surface thereof after operating the vaporiser body (1) and reacts with the nitrogen of the vaporiser body (1) by forming an aluminium nitride layer on the vaporiser surface, when in the melted state. Said initial wetting auxiliary material also comprises a wetting agent which distributes the melted aluminium in a regular manner and over a large surface of the vaporiser surface.
(FR) Matière auxiliaire de mouillage initial destinée à être appliquée sur la surface de vaporisation d'un corps de vaporisation (1) en céramique pouvant être chauffé électriquement, qui est destiné à être utilisé dans une installation de métallisation par dépôt physique en phase vapeur pour la vaporisation d'aluminium et qui contient de l'azote, en particulier sous forme de nitrure de bore en tant que constituant. Ladite matière auxiliaire de mouillage initial contient de l'aluminium qui fond sur la surface de vaporisation après le début de la chauffe du corps de vaporisation (1) et qui réagit à l'état fondu avec l'azote du corps de vaporisation (1) en formant une couche de nitrure d'aluminium sur la surface de vaporisation, et un agent de mouillage qui favorise une répartition régulière et sur une grande surface de l'aluminium fondu sur la surface de vaporisation.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)
Also published as:
EP1899495US20090129762CN101238237IN10232/DELNP/2007