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1. (WO2007000901) SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2007/000901 International Application No.: PCT/JP2006/312042
Publication Date: 04.01.2007 International Filing Date: 15.06.2006
IPC:
B01J 19/00 (2006.01) ,C03C 23/00 (2006.01) ,C04B 41/91 (2006.01) ,C23C 8/16 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19
Chemical, physical, or physico-chemical processes in general; Their relevant apparatus
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
C CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
41
After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
80
of only ceramics
91
involving the removal of part of the materials of the treated articles, e.g. etching
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
8
Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
06
using gases
08
only one element being applied
10
Oxidising
16
using oxygen-containing compounds, e.g. H2O, CO2
Applicants:
旭テック株式会社 ASAHI TECH CO., LTD. [JP/JP]; 〒5420083 大阪府大阪市中央区東心斎橋1丁目10番7号 Osaka 10-7, Higashishinsaibashi 1-chome, Chuo-ku, Osaka-shi, Osaka 5420083, JP (AllExceptUS)
高柳 晃一郎 TAKAYANAGI, Koichiro [JP/JP]; JP (UsOnly)
Inventors:
高柳 晃一郎 TAKAYANAGI, Koichiro; JP
Agent:
鍬田 充生 KUWATA, Mitsuo; 〒5300047 大阪府大阪市北区西天満6丁目3番17号みなと梅田ビル6階 鍬田充生特許事務所 Osaka KUWATA & CO. 6th Floor, Minato Umeda Building 3-17, Nishitemma 6-chome Kita-ku, Osaka-shi Osaka 5300047, JP
Priority Data:
2005-18858428.06.2005JP
Title (EN) SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM
(FR) ÉLÉMENT MODIFIÉ EN SURFACE, PROCÉDÉ DE TRAITEMENT DE SURFACE ET SYSTÈME DE TRAITEMENT DE SURFACE
(JA) 表面改質された部材、表面処理方法および表面処理装置
Abstract:
(EN) A member exhibiting high antistatic properties and hydrophilicity which is capable of preventing adhesion of contaminants, and a method and system for surface treatment. The surface treatment system comprises a steam generation unit (1), an overheating unit (5) for overheating steam to generate overheated steam, and a processing unit (11) for spraying or bringing the overheated steam to a member to be treated (ceramics, metals)(14). The member to be treated can be imparted with hydrophilicity and antistatic properties when it is treated with overheated steam of 300-1000˚C. The member to be treated may be a member (window member) in contact with the processing space in a vapor phase surface treatment system (such as a chamber) for surface treating a substrate by vapor phase method such as PVD, CVD, and dry etching.
(FR) L’invention concerne un élément présentant d’excellentes propriétés antistatiques et hydrophiles et capable d’empêcher l’adhérence des contaminants, de même qu’un procédé et un système de traitement de surface. Le système de traitement de surface comprend une unité de production de vapeur (1), une unité de surchauffe (5) pour surchauffer une vapeur afin de générer de la vapeur surchauffée, et une unité de traitement (11) permettant de pulvériser ou d’acheminer la vapeur surchauffée vers un élément à traiter (céramiques, métaux)(14). On peut conférer des propriétés hydrophiles et antistatiques à l’élément à traiter par un traitement à la vapeur surchauffée à 300-1000°C. L’élément à traiter peut être un élément (élément fenêtre) au contact de l’espace de traitement dans un système de traitement superficiel en phase gazeuse (comme une chambre) pour traiter en surface un substrat par un procédé en phase gazeuse de type PVD, CVD et attaque chimique à sec.
(JA)  非帯電性及び親水性が高く、汚染物質の付着を防止できる部材と表面処理方法及びその装置を提供する。  表面処理装置は、水蒸気発生ユニット1と、水蒸気を過熱して過熱水蒸気を発生させるための過熱ユニット5と、過熱水蒸気を被処理部材(セラミックス類、金属類)14に噴霧又は接触させるための処理ユニット11とを備えている。被処理部材を、300~1000°Cの過熱水蒸気で処理すると、親水性及び帯電防止性を付与できる。被処理部材は、PVD,CVD,ドライエッチングなどの気相法により基材を表面処理する気相表面処理装置(チャンバーなど)内の処理空間と接触する部材(窓部材など)であってもよい。
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
KR1020080023264EP1913996US20090035523JP4553939CN101262938