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1. (WO2006125744) DEVICE AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/125744    International Application No.:    PCT/EP2006/062412
Publication Date: 30.11.2006 International Filing Date: 18.05.2006
IPC:
H01L 21/00 (2006.01)
Applicants: SEZ AG [AT/AT]; SEZ-Strasse 1, A-9500 Villach (AT) (For All Designated States Except US).
BALDY, Andreas [DE/AT]; (AT) (For US Only).
GIGACHER, Markus [AT/AT]; (AT) (For US Only).
BRUGGER, Michael [AT/AT]; (AT) (For US Only)
Inventors: BALDY, Andreas; (AT).
GIGACHER, Markus; (AT).
BRUGGER, Michael; (AT)
Agent: KONTRUS, Gerhard; Sez AG, SEZ-Strasse 1, A-9500 Villach (AT)
Priority Data:
A 905/2005 25.05.2005 AT
Title (EN) DEVICE AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
(FR) DISPOSITIF ET PROCEDE POUR TRAITEMENT LIQUIDE D'ARTICLES EN FORME DE TRANCHES
Abstract: front page image
(EN)Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W1, a second surface plane W2 and an edge surface. The device comprises a support for holding the wafer-shaped article; liquid dispensing means for dispensing liquid onto said first surface plane W1 of the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of said liquid around the edge surface of the wafer-shaped article towards the second surface plane W2 of the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein said liquid guiding member has the form of a ring.
(FR)L'invention concerne un procédé et un dispositif permettant de traiter par voie humide une zone d'arête périphérique définie d'un article en forme de tranche comportant un premier plan superficiel W1, un second plan superficiel W2 et une surface d'arête. Ledit dispositif comprend un support pour maintenir un article en forme de tranche; un moyen de distribution de liquide pour distribuer un liquide sur ledit premier plan superficiel W1 de l'article en forme de tranche, qui n'est pas tourné vers le support, pour guider au moins une partie dudit liquide autour de la surface d'arête de l'article en forme de tranche en direction du second plan superficiel W2 de l'article en forme de tranche, qui fait face au support, humidifiant ainsi au moins la surface d'arête, l'élément de guidage du liquide ayant la forme d'un anneau.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)