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Machine translation
1. (WO2006125461) TREATMENT SOLUTION AND METHOD OF APPLYING A PASSIVATING LAYER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/125461    International Application No.:    PCT/EP2005/006501
Publication Date: 30.11.2006 International Filing Date: 25.05.2005
IPC:
H01L 21/321 (2006.01), H01L 21/00 (2006.01), C11D 11/00 (2006.01)
Applicants: FREESCALE SEMICONDUCTOR, INC [US/US]; 6501 William Cannon, Austin, TX 78735 (US) (For All Designated States Except US).
FARKAS, Janos [US/FR]; (FR) (For US Only).
PETITDIDIER, Sebastien [FR/FR]; (FR) (For US Only)
Inventors: FARKAS, Janos; (FR).
PETITDIDIER, Sebastien; (FR)
Agent: WRAY, Antony, John; Freescale Semiconductor, Inc., c/o Impetus IP Limited,, Grove House, Lutyens Close, Chineham Court,, Basingstoke, Hampshire RG24 8AG (GB)
Priority Data:
Title (EN) TREATMENT SOLUTION AND METHOD OF APPLYING A PASSIVATING LAYER
(FR) SOLUTION DE TRAITEMENT ET PROCEDE POUR APPLIQUER UNE COUCHE DE PASSIVATION
Abstract: front page image
(EN)A treatment solution for a semiconductor wafer (126) comprising water, a passivating reagent and a surfactant. The treatment solution is either mixed with a cleaning fluid, a rinsing fluid or a drying vapour, and is used in a cleaning apparatus employing a Marangoni dryer.
(FR)La présente invention concerne une solution de traitement pour une plaquette de semi-conducteur (126) comprenant de l'eau, un réactif de passivation et un agent tensioactif. Cette solution de traitement est mélangée à un fluide de nettoyage, à un fluide de rinçage ou à une vapeur de séchage et est utilisée dans un appareil de nettoyage qui met en oeuvre un séchoir de Marangoni.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)