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1. WO2006123300 - MICRO-ELECTRO-MECHANICAL TRANSDUCERS

Publication Number WO/2006/123300
Publication Date 23.11.2006
International Application No. PCT/IB2006/051568
International Filing Date 18.05.2006
IPC
H02N 1/00 2006.01
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
1Electrostatic generators or motors using a solid moving electrostatic charge carrier
H04R 19/00 2006.01
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19Electrostatic transducers
H04R 31/00 2006.01
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
31Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
B81B 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
CPC
B06B 1/0292
BPERFORMING OPERATIONS; TRANSPORTING
06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, ; e.g.; FOR PERFORMING MECHANICAL WORK IN GENERAL
1Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
02making use of electrical energy
0292Electrostatic transducers, e.g. electret-type
H01L 2924/0002
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2924Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
0001Technical content checked by a classifier
0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Y10T 29/49005
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49002Electrical device making
49005Acoustic transducer
Applicants
  • KOLO TECHNOLOGIES, INC. [US]/[US] (AllExceptUS)
  • HUANG, Yongli [US]/[US] (UsOnly)
Inventors
  • HUANG, Yongli
Agents
  • GAO M., ZeMing
Priority Data
60/682,61918.05.2005US
60/692,03817.06.2005US
60/705,60603.08.2005US
60/744,24204.04.2006US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MICRO-ELECTRO-MECHANICAL TRANSDUCERS
(FR) TRANSDUCTEURS MECANIQUES MICROELECTRIQUES
Abstract
(EN)
A micro-electro-mechanical transducer (such as a cMUT) that has a movable mechanical part to transform energy. The transducer (511) has a substrate (501), a top plate (540), and a resilient structure (520) therebetween. The resilient structure has multiple connectors (530) distributed over the device element area to vertically transport the top player with distributed support not limited to edges. The resilient structure (520) may be cantilevers, or cantilever-containing structures such as bridges or crossbars, formed using a middle spring layer coveting cavities on the substrate. Connectors (530) define a transducing space below the top plate (540). The resilient structure (520) such as cantilevers enable a vertical displacement of the connectors, which transports the top plate (540) in a piston-like motion to change the transducing space and to effectuate energy transformation. No separate cells are necessary for each addressable transducer element. Multiple device elements can be made on the same substrate.
(FR)
L'invention concerne un transducteur mécanique microélectrique (tel qu'un cMUT), qui comprend un substrat, une plaque supérieure et, entre les deux, une structure élastique. La structure élastique comprend plusieurs connecteurs répartis sur la zone des éléments du dispositif de façon à transporter verticalement la plaque supérieure présentant un support réparti. La structure élastique peut être constituée de porte-à-faux formés par l'utilisation d'une couche ressort médiane recouvrant des cavités ménagées sur le substrat. Des connecteurs délimitent un espace de transduction sous la plaque supérieure. La structure élastique autorise un déplacement vertical des connecteurs qui transportent la plaque supérieure dans un mouvement piston destiné à modifier l'espace de transduction et à effectuer une transformation d'énergie. Aucune cellule séparée n'est nécessaire pour les éléments de transducteur adressables. Plusieurs éléments du dispositif peuvent être réalisés sur le même substrat.
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