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Machine translation
1. (WO2006123239) DISPLACEMENT SENSOR, ITS USE, AND METHOD FOR MAKING SUCH A SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/123239    International Application No.:    PCT/IB2006/001326
Publication Date: 23.11.2006 International Filing Date: 19.05.2006
IPC:
G01N 27/00 (2006.01), G01Q 10/00 (2010.01), G01Q 20/00 (2010.01), G01Q 20/04 (2010.01), G01Q 60/24 (2010.01), G01Q 70/16 (2010.01)
Applicants: UNIVERSITY OF BASEL [CH/CH]; Petersgraben 35, Wtt-stelle, CH-4003 Basel (CH) (For All Designated States Except US).
DORRESTIJN, Marco [CH/CH]; (CH) (For US Only).
BIETSCH, Alexander [CH/CH]; (CH) (For US Only).
MEYER, Ernst [CH/CH]; (CH) (For US Only).
GERBER, Christoph [CH/CH]; (CH) (For US Only)
Inventors: DORRESTIJN, Marco; (CH).
BIETSCH, Alexander; (CH).
MEYER, Ernst; (CH).
GERBER, Christoph; (CH)
Common
Representative:
UNIVERSITY OF BASEL; Petersgraben 35, Wtt-stelle, CH-4003 Basel (CH)
Priority Data:
0512657.8 19.05.2005 GB
Title (EN) DISPLACEMENT SENSOR, ITS USE, AND METHOD FOR MAKING SUCH A SENSOR
(FR) CAPTEUR DE DEPLACEMENT, SON UTILISATION ET SON PROCEDE DE PRODUCTION
Abstract: front page image
(EN)A novel, highly sensitive mechanism to measure nanometer-scale mechanical displacements, especially applicable as readout mechanism for MEMS (Micro-Electro-Mechanical System) and NEMS (Nano-Electro-Mechanical System), e.g. motion sensors, physical sensors, cantilever sensors, etc. is disclosed. Contrary to usual measuring methods the mechanism uses a compliant insulator located between a translating member and a fixed member of the device, which insulator is compressed or expanded, resp. when the translating member moves. A measuring device determinates the change in an electrical value of said insulator upon its compression/expansion, e.g. the capacity of or the tunnel current through the insulator. The main advantages of a compliant insulator over an air or vacuum gap are the inherent 'vertical' alignment, the prevention of ' snap-in', optional operation in liquid, and insensitivity to contamination.
(FR)L'invention concerne un nouveau mécanisme hautement sensible destiné à mesurer des déplacements mécaniques à échelle nanométrique, particulièrement applicable sous la forme d'un mécanisme d'affichage pour MEMS (système micro-électro-mécanique) et NEMS (système nano-électro-mécanique), par exemple des capteurs de mouvement, des capteurs physiques, des capteurs à porte-à-faux etc. Contrairement aux procédés usuels de mesure, le mécanisme utilise un isolant souple situé entre un élément de translation et un élément fixe du dispositif, lequel isolant est comprimé ou dilaté, respectivement lorsque l'élément de translation bouge. Un dispositif de mesure détermine le changement de valeur électrique dudit isolant lors de sa compression/dilatation, par exemple la capacité du courant à effet tunnel dans l'isolant. Les avantages principaux d'un isolant souple par rapport à un entrefer ou à un espace vide sont l'alignement 'vertical' inhérent, la prévention d'une 'pression', un fonctionnement optionnel dans du liquide ainsi que l'insensibilité à la contamination.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)