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Machine translation
1. (WO2006121162) PROCESS FOR PRODUCING RADIATION-SENSITIVE RESIN COMPOSITION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/121162    International Application No.:    PCT/JP2006/309587
Publication Date: 16.11.2006 International Filing Date: 12.05.2006
Chapter 2 Demand Filed:    02.08.2006    
IPC:
G03F 7/039 (2006.01), G03F 7/26 (2006.01), H01L 21/027 (2006.01)
Applicants: JSR CORPORATION [JP/JP]; 6-10, Tsukiji 5-chome, Chuo-ku, Tokyo 1048410 (JP) (For All Designated States Except US).
ITOU, Kouji [JP/JP]; (JP) (For US Only).
YOSHIDA, Kouichirou [JP/JP]; (JP) (For US Only)
Inventors: ITOU, Kouji; (JP).
YOSHIDA, Kouichirou; (JP)
Agent: WATANABE, Kazuhira; 3rd Fl., No.8 Kikuboshi Tower Building 20-18, Asakusabashi 3-chome Taito-ku, Tokyo 1110053 (JP)
Priority Data:
2005-141208 13.05.2005 JP
Title (EN) PROCESS FOR PRODUCING RADIATION-SENSITIVE RESIN COMPOSITION
(FR) PROCÉDÉ DE PRODUCTION D’UNE COMPOSITION DE RÉSINE SENSIBLE AUX RADIATIONS
(JA) 感放射線性樹脂組成物の製造方法
Abstract: front page image
(EN)A process for producing a radiation-sensitive resin composition, comprising the step of providing a filter apparatus equipped with a filter composed of a polyamide resin filter and a polyethylene resin filter connected in series and circulating a precursor composition for radiation-sensitive resin composition in the filter apparatus so that the precursor composition is passed through the filter two or more times to thereby effect filtration with the result that foreign matter is removed from the precursor composition.
(FR)Le procédé de production d’une composition de résine sensible aux radiations selon l’invention implique la mise en place d’un dispositif de filtrage comportant un filtre composé d’un filtre en résine polyamide et un filtre en résine polyéthylène connectés en série et le passage d’une composition précurseur de la composition de résine sensible aux radiations dans le dispositif de filtrage de sorte que la composition précurseur passe deux fois ou plus à travers le filtre afin d’obtenir une filtration dont le résultat est l’élimination des matières étrangères de la composition précurseur.
(JA) ポリアミド系樹脂フィルターおよびポリエチレン系樹脂フィルターが直列に連結されたフィルターを備えたフィルター装置を用い、感放射線性樹脂組成物の予備組成物を前記フィルター装置内で循環させ、前記予備組成物を前記フィルターに複数回通過させることにより濾過を行い、前記予備組成物中の異物を除去する工程を含む感放射線性樹脂組成物の製造方法。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)