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1. (WO2006119251) ULTRATHIN POROUS NANOSCALE MEMBRANES, METHODS OF MAKING, AND USES THEREOF
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/119251    International Application No.:    PCT/US2006/016743
Publication Date: 09.11.2006 International Filing Date: 01.05.2006
IPC:
B01D 61/00 (2006.01), B01D 53/22 (2006.01), H01L 29/00 (2006.01), C23F 1/00 (2006.01), B82B 1/00 (2006.01), B82B 3/00 (2006.01)
Applicants: UNIVERSITY OF ROCHESTER [US/US]; 611 Hylan Building, P.o. Box 270142, Rochester, New York 14627-0142 (US) (For All Designated States Except US)
Inventors: STRIEMER, Christopher, C.; (US).
FAUCHET, Philippe, M.; (US).
MCGRATH, James, L.; (US).
GABORSKI, Thomas, R.; (US)
Agent: MERKEL, Edwin, V.; Nixon Peabody LLP, Clinton Square, P.o. Box 31051, Rochester, New York 14603-1051 (US)
Priority Data:
60/675,963 29.04.2005 US
60/782,001 14.03.2006 US
Title (EN) ULTRATHIN POROUS NANOSCALE MEMBRANES, METHODS OF MAKING, AND USES THEREOF
(FR) MEMBRANES NANOPOREUSES ULTRAFINES, PROCEDE DE FABRICATION ET LEURS UTILISATIONS
Abstract: front page image
(EN)A process for forming a porous nanoscale membrane is described. The process involves applying a nanoscale film to one side of a substrate, where the nanoscale film includes a semiconductor material; masking an opposite side of the substrate; etching the substrate, beginning from the masked opposite side of the substrate and continuing until a passage is formed through the substrate, thereby exposing the film on both sides thereof to form a membrane; and then simultaneously forming a plurality of randomly spaced pores in the membrane. The resulting porous nanoscale membranes, characterized by substantially smooth surfaces, high pore densities, and high aspect ratio dimensions, can be used in filtration devices, microfluidic devices, fuel cell membranes, and as electron microscopy substrates.
(FR)La présente invention concerne un procédé de formation d'une membrane nanoporeuse. En l'occurrence, on applique sur une face d'un substrat un film nanométrique comportant un matériau semi-conducteur. On masque la face opposée, et on attaque le substrat en partant de la face opposée masquée jusqu'à former un passage au travers du substrat, ce qui dégage le film des deux côtés pour former une membrane. Pour conclure, on réalise dans la membrane une pluralité de pores à intervalles aléatoires. Les membranes nanoporeuses obtenues, caractérisées par des surfaces sensiblement lisses, une haute densité de pores, des dimensions du rapport d'aspect élevées, conviennent particulièrement pour les dispositifs de filtration, les dispositifs microfluidiques, les membranes de piles à combustible, et les substrat de microscopie électronique.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)