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1. WO2006119011 - VERSATILE SEMICONDUCTOR MANUFACTURING CONTROLLER WITH STATISTICALLY REPEATABLE RESPONSE TIMES

Publication Number WO/2006/119011
Publication Date 09.11.2006
International Application No. PCT/US2006/016212
International Filing Date 28.04.2006
IPC
G06F 15/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
15Digital computers in general; Data processing equipment in general
G06F 19/00 2011.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
19Digital computing or data processing equipment or methods, specially adapted for specific applications
CPC
G05B 19/4184
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
4184characterised by fault tolerance, reliability of production system
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
H01L 21/00
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L 21/02
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
Y02P 90/02
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
90Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Y02P 90/80
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
90Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
80Management or planning
Applicants
  • MKS INSTRUMENTS, INC. [US]/[US] (AllExceptUS)
  • ROZENBOIM, Leonid [IL]/[US] (UsOnly)
  • GOSCH, David, Michael [US]/[US] (UsOnly)
Inventors
  • ROZENBOIM, Leonid
  • GOSCH, David, Michael
Agents
  • BEFFEL, Ernest, J., Jr.
Priority Data
11/411,00525.04.2006US
60/676,77002.05.2005US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) VERSATILE SEMICONDUCTOR MANUFACTURING CONTROLLER WITH STATISTICALLY REPEATABLE RESPONSE TIMES
(FR) CONTROLEUR POLYVALENT DE FABRICATION DE SEMI-CONDUCTEURS AVEC DES TEMPS DE REPONSE STATISTIQUEMENT REPETITIFS
Abstract
(EN) The I/O controller with related processes used for semiconductor manufacturing in which a tool host can delegate data collection and monitoring and control tasks (127). Wherein the process I/O controllers can perform more than one task of data collection or monitoring or control and response to commands from a tool host with statistically repeatable performance and precision. The embodiments described herein use prioritized real time operating systems to control the semiconductor manufacturing tool and data collection from tools associated with the sensors. The statistically repeatable responsiveness to selected commands and to sensor inputs during the selected recipe steps effectively reduces jitter.
(FR) La présente invention concerne des contrôleurs E/S de processus, destinés à la fabrication de semi-conducteurs, auxquels un hôte d'outils peut transmettre les tâches de collecte de données, de surveillance et de commande. L'invention concerne plus particulièrement des contrôleurs E/S de processus qui peuvent effectuer plus d'une opération de collecte de données, de surveillance, de contrôle et de réponse aux commandes d'un hôte d'outils avec des performances et une précision statistiquement répétitives. Les modes de réalisation décrits utilisent des systèmes d'exploitation prioritisés en temps réel pour contrôler la fabrication d'outils semi-conducteurs et la collecte de données à partir d'un outil associé à des capteurs. La capacité de réponse statistiquement répétitive aux commandes sélectionnées et aux entrées de capteurs pendant les stades de réception sélectionnés permet de réduire efficacement la gigue.
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