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1. (WO2006118312) LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/118312    International Application No.:    PCT/JP2006/309191
Publication Date: 09.11.2006 International Filing Date: 26.04.2006
IPC:
H01L 21/268 (2006.01), H01L 21/20 (2006.01), H01L 21/265 (2006.01), H01L 21/336 (2006.01), H01L 29/786 (2006.01)
Applicants: SEMICONDUCTOR ENERGY LABORATORY CO., LTD. [JP/JP]; 398, Hase, Atsugi-shi, Kanagawa, 2430036 (JP) (For All Designated States Except US).
TANAKA, Koichiro [JP/JP]; (JP) (For US Only)
Inventors: TANAKA, Koichiro; (JP)
Priority Data:
2005-133788 02.05.2005 JP
Title (EN) LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
(FR) APPAREIL D’IRRADIATION LASER ET PROCEDE D’IRRADIATION LASER
Abstract: front page image
(EN)A laser beam having homogeneous intensity distribution is delivered without causing interference stripes of a laser to appear on an irradiation surface. A laser beam emitted from a laser oscillator passes through a diffractive optical element so that the intensity distribution thereof is homogenized. The beam emitted from the diffractive optical element then passes through a slit so that low-intensity end portions in a major-axis direction of the beam are blocked. Subsequently, the beam passes through a projecting lens and a condensing lens, so that an image of the slit is projected onto the irradiation surface. The projecting lens is provided so that the slit and the irradiation surface are conjugated. Thus, the irradiation surface can be irradiated with the laser having homogeneous intensity while preventing the diffraction by the slit.
(FR)L’invention concerne un faisceau laser à distribution d’intensité homogène fourni sans entraîner l’apparition de bandes d’interférence d’un laser sur une surface d’irradiation. Un faisceau laser émis par un oscillateur laser traverse un élément optique diffractif de sorte que sa distribution d’intensité soit homogénéisée. Le faisceau émis par l’élément optique diffractif traverse ensuite une fente de sorte que des parties d’extrémité à faible intensité dans une direction d’axe principal du faisceau soient bloquées. Par conséquent, le faisceau traverse une lentille de projection et une lentille condensatrice, de sorte qu’une image de la fente soit projetée sur la surface d’irradiation. La lentille de projection est prévue de sorte que la fente et la surface d’irradiation soient conjuguées. Ainsi, la surface d’irradiation peut être irradiée par le laser à intensité homogène tout en empêchant la diffraction par la fente.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)