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1. WO2006118118 - SCANNING MECHANISM FOR SCANNING PROBE MICROSCOPE

Publication Number WO/2006/118118
Publication Date 09.11.2006
International Application No. PCT/JP2006/308662
International Filing Date 25.04.2006
IPC
G01B 21/00 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
G01B 21/30 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
30for measuring roughness or irregularity of surfaces
G01Q 10/00 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
G01Q 10/04 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
G01Q 30/18 2010.01
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
18Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields
CPC
G01Q 10/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
Applicants
  • オリンパス株式会社 OLYMPUS CORPORATION [JP]/[JP] (AllExceptUS)
  • 上 喜裕 UE, Yoshihiro [JP]/[JP] (UsOnly)
Inventors
  • 上 喜裕 UE, Yoshihiro
Agents
  • 鈴江 武彦 SUZUYE, Takehiko
Priority Data
2005-12946827.04.2005JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SCANNING MECHANISM FOR SCANNING PROBE MICROSCOPE
(FR) MECANISME DE BALAYAGE POUR MICROSCOPE A SONDE DE BALAYAGE
(JA) 走査型プローブ顕微鏡用走査機構
Abstract
(EN)
A scanning mechanism for a scanning probe microscope is provided with an XY stage composed of a movable section (4), an XY elastic member, Z elastic members (7A, 7B) and a fixing section (5); a fixing table (1) for fixing the XY stage; an X piezoelectric body (2A) for moving the movable section (4) in an X direction; a Y piezoelectric body for moving the movable section (4) in a Y direction; a substrate (11) fixed on an upper plane of the movable section (4); a Z piezoelectric body (3) fixed on an upper plane of the substrate (11) for moving a moving object in a Z direction; a cover (9) for covering almost the entire movable section (4), X piezoelectric body (2A) and Y piezoelectric body; and a damping member (10) arranged between the movable section (4) and the cover (9) in the periphery of the Z piezoelectric body (3). An upper end of the Z piezoelectric body (3) is positioned higher than an upper plane of the cover (9).
(FR)
L’invention porte sur un mécanisme de balayage pour un microscope à sonde de balayage pourvu d’un étage XY composé d’une section mobile (4), d’un membre élastique XY, de membres élastiques Z (7A, 7B) et d’une section de fixation (5) ; d’une table de fixation (1) pour fixer l’étage XY ; d’un corps piézoélectrique X (2A) pour déplacer la section mobile (4) dans une direction X ; d’un corps piézoélectrique Y pour déplacer la section mobile (4) dans une direction Y ; d’un substrat (11) fixé sur un plan supérieur de la section mobile (4) ; d’un corps piézoélectrique Z (3) fixé sur un plan supérieur du substrat (11) pour déplacer un objet mobile dans une direction Z ; d’un couvercle (9) pour couvrir presque l’ensemble de la section mobile (4), un corps piézoélectrique X (2A) et un corps piézoélectrique Y ; et d’un membre amortisseur (10) disposé entre la section mobile (4) et le couvercle (9) dans la périphérie du corps piézoélectrique Z (3). Une extrémité supérieure du corps piézoélectrique Z (3) est positionné plus haut que le plan supérieur du couvercle (9).
(JA)
 走査型プローブ顕微鏡用走査機構は、可動部(4)とXY弾性部材とZ弾性部材(7Aと7B)と固定部(5)とからなるXYステージと、XYステージが固定される固定台(1)と、可動部(4)をX方向に移動させるX圧電体(2A)と、可動部(4)をY方向に移動させるY圧電体と、可動部(4)の上面に固定された基板(11)と、基板(11)の上面に固定された、移動対象物をZ方向に移動させるZ圧電体(3)と、可動部(4)とX圧電体(2A)とY圧電体のほとんどを覆うカバー(9)と、Z圧電体(3)の周囲の可動部(4)とカバー(9)の間に設けられたダンピング部材(10)とを有し、Z圧電体(3)の上端がカバー(9)の上面よりも高い位置に位置している。
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