WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |

Search International and National Patent Collections
World Intellectual Property Organization
Machine translation
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/116767    International Application No.:    PCT/US2006/016659
Publication Date: 02.11.2006 International Filing Date: 27.04.2006
G01R 31/28 (2006.01), G01R 1/073 (2006.01)
Applicants: AEHR TEST SYSTEMS [US/US]; 400 Kato Terrace, Fremont, California 94539 (US) (For All Designated States Except US).
RICHMOND, Donald, P., II [US/US]; (US) (For US Only).
DEBOE, Kenneth, W. [US/US]; (US) (For US Only).
UHER, Frank, O. [US/US]; (US) (For US Only).
JOVANOVIC, Jovan [YU/US]; (US) (For US Only).
LINDSEY, Scott, E [US/US]; (US) (For US Only).
MAENNER, Thomas, T. [DE/US]; (US) (For US Only).
SHEPHERD, Patrick, M.; (For US Only).
TYSON, Jeffrey, L.; (For US Only).
CARBONE, Mark, C. [US/US]; (US) (For US Only).
BURKE, Paul, W. [US/US]; (US) (For US Only).
CAO, Doan, D. [US/US]; (US) (For US Only).
TOMIC, James, F. [US/US]; (US) (For US Only).
VU, Long, V. [--/US]; (US) (For US Only)
Inventors: RICHMOND, Donald, P., II; (US).
DEBOE, Kenneth, W.; (US).
UHER, Frank, O.; (US).
LINDSEY, Scott, E; (US).
MAENNER, Thomas, T.; (US).
SHEPHERD, Patrick, M.; .
TYSON, Jeffrey, L.; .
CARBONE, Mark, C.; (US).
BURKE, Paul, W.; (US).
CAO, Doan, D.; (US).
TOMIC, James, F.; (US).
VU, Long, V.; (US)
Agent: DEKLERK, Stephen, M.; Blakely, Sokoloff, Taylor & Zafman LLP, 12400 Wilshire Boulevard, 7th Floor, Los Angeles, California 90025 (US)
Priority Data:
60/675,546 27.04.2005 US
60/682,989 19.05.2005 US
60/687,502 03.06.2005 US
Abstract: front page image
(EN)An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
(FR)L'invention concerne un appareil de rodage fonctionnel et/ou de test fonctionnel de circuits microélectroniques sur des tranches non différenciées. L'appareil selon l'invention permet d'effectuer un nombre important de raccords d'alimentation, de connexions de masse et de signal sur un nombre important de tranches. L'appareil dispose d'une cartouche qui permet d'aérer les passages électriques. Un tableau de distribution possède une pluralité d'interfaces positionnées de manière stratégique pour présenter une configuration dense. Les interfaces sont connectées par l'intermédiaire de fixations souples sur une matrice de premiers modules de connexion. Chaque premier module de connexion peut être connecté indépendamment avec plusieurs deuxièmes modules de connexion respectifs, ce qui permet de réduire les contraintes sur un bâti de l'appareil. D'autres modes de réalisation prévoient notamment un piston qui permet un contrôle serré des forces exercées par les bornes sur les contacts d'une tranche.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)