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Machine translation
1. (WO2006116356) METHOD AND APPARATUS FOR MEASURING DIMENSIONAL CHANGES IN TRANSPARENT SUBSTRATES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/116356    International Application No.:    PCT/US2006/015553
Publication Date: 02.11.2006 International Filing Date: 20.04.2006
IPC:
G01N 1/28 (2006.01), G01N 21/00 (2006.01), G06F 15/00 (2006.01)
Applicants: CORNING INCORPORATED [US/US]; 1 Riverfront Plaza, Corning, NY 14831 (US) (For All Designated States Except US).
FOX, Richard, L. [US/US]; (US) (For US Only).
KANG, Kiat, C. [MY/US]; (US) (For US Only).
PRESCOD, Andru, J. [TT/US]; (US) (For US Only)
Inventors: FOX, Richard, L.; (US).
KANG, Kiat, C.; (US).
PRESCOD, Andru, J.; (US)
Agent: NICASTRI, Christopher; Corning Incorporated, Patent Department, SP-TI-3-1, Corning, NY 14831 (US)
Priority Data:
11/118,724 28.04.2005 US
Title (EN) METHOD AND APPARATUS FOR MEASURING DIMENSIONAL CHANGES IN TRANSPARENT SUBSTRATES
(FR) PROCEDE ET DISPOSITIF DE MESURE DE CHANGEMENTS DIMENSIONNELS DANS DES SUBSTRATS TRANSPARENTS
Abstract: front page image
(EN)A method of measuring dimensional changes in a transparent substrate (S 1 ) includes forming an array of reference markers (M2) on a reference plate (S1), forming an array of substrate markers (M1) on the transparent substrate (S2), stacking the reference plate (S2) and transparent substrate (S1) such that the reference markers(MI) and substrate markers (M2) overlap, measuring coordinates of the substrate markers (M1) relative to coordinates of the reference markers (M2) before and after processing the transparent substrate (S1), and determining dimensional changes in the transparent substrate from the difference between the measured relative coordinates of the substrate markers (M1) befor and after processing the transparent substrate (S1).
(FR)Procédé de mesure de changements dimensionnels survenus dans un substrat, qui englobe les opérations suivantes: formation d'un ensemble de marqueurs de référence sur une plaque de référence; formation d'un ensemble de marqueurs de substrat sur un substrat transparent; superposition de la plaque de référence et du substrat transparent de telle sorte que les repères de référence et les repères du substrat se chevauchent; mesure des coordonnées des marqueurs de substrat par rapport aux coordonnées des marqueurs de référence avant et après traitement du substrat transparent; et détermination des changements dimensionnels survenus dans le substrat transparent à partir de l'écart entre les coordonnées relatives mesurées des marqueurs de substrat avant et après traitement dudit substrat.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)