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Machine translation
1. (WO2006116282) NON-CONTACTING ELECTROSTATICALLY-DRIVEN MEMS DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/116282    International Application No.:    PCT/US2006/015430
Publication Date: 02.11.2006 International Filing Date: 24.04.2006
IPC:
G02B 26/08 (2006.01), G02B 26/00 (2006.01)
Applicants: TEXAS INSTRUMENTS INCORPORATED [US/US]; P.o. Box 655474, Mail Station 3999, Dallas, Texas 75265-5474 (US) (For All Designated States Except US).
STRUMPELL, Mark, H. [US/US]; (US) (For US Only)
Inventors: STRUMPELL, Mark, H.; (US)
Agent: FRANZ, Warren, L.; TEXAS INSTRUMENTS INCORPORATED, DEPUTY GENERAL PATENT COUNSEL, P.o. Box 655474, M/S 3999, Dallas, Texas 75265-5474 (US)
Priority Data:
10/907,992 22.04.2005 US
Title (EN) NON-CONTACTING ELECTROSTATICALLY-DRIVEN MEMS DEVICE
(FR) SYSTEME MICROELECTROMECANIQUE A COMMANDE ELECTROSTATIQUE SANS CONTACT
Abstract: front page image
(EN)A microelectromechanical systems (MEMS) device (200) is provided which has reduced stiction. The MEMS device includes a central electrode (216) and a pair of outer electrodes (220) formed on a substrate. The central electrode includes a plurality of extensions defining a plurality of grooves (221) interspersed with the extensions (218). The outer electrodes include a plurality of extensions disposed within the grooves of the central electrode.
(FR)L'invention a pour objet un système microélectromécanique (MEMS) (200) à frottement réduit. Le MEMS comprend une électrode centrale (216) et une paire d'électrodes extérieures (220) formées sur un substrat. L'électrode centrale comprend une pluralité d'extensions définissant une pluralité de rainures (221) intercalées avec les extensions (218). Les électrodes extérieures comprennent une pluralité d'extensions disposées dans les rainures de l'électrode centrale.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)