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1. WO2006101646 - METHOD FOR FORMING A RUTHENIUM METAL LAYER ON A PATTERNED SUBSTRATE

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China 21.02.2006200680008623.7
Japan 13.09.20072008501891
Republic of Korea 14.09.20071020077021122Published: 22.11.2007
Granted: 27.06.2011
Expired: 27.09.2015
European Patent Office6735617Withdrawn: 09.04.2008
Russian FederationWithdrawn: 16.10.2007