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1. WO2006100968 - METHOD OF FILM FORMATION, FILM FORMATION APPARATUS, PERMANENT MAGNET, AND PROCESS FOR PRODUCING PERMANENT MAGNET

Publication Number WO/2006/100968
Publication Date 28.09.2006
International Application No. PCT/JP2006/305034
International Filing Date 14.03.2006
IPC
C23C 14/54 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
54Controlling or regulating the coating process
C23C 14/22 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
H01F 1/053 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
1Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
01of inorganic materials
03characterised by their coercivity
032of hard-magnetic materials
04metals or alloys
047Alloys characterised by their composition
053containing rare earth metals
H01F 10/12 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
10Thin magnetic films, e.g. of one-domain structure
08characterised by magnetic layers
10characterised by the composition
12being metals or alloys
H01F 41/20 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
41Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
14for applying magnetic films to substrates
20by evaporation
CPC
C23C 14/16
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
14Metallic material, boron or silicon
16on metallic substrates or on substrates of boron or silicon
C23C 14/243
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
243Crucibles for source material
C23C 14/541
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
54Controlling or regulating the coating process
541Heating or cooling of the substrates
H01F 1/0571
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
1Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
01of inorganic materials
03characterised by their coercivity
032of hard-magnetic materials
04metals or alloys
047Alloys characterised by their composition
053containing rare earth metals
055and magnetic transition metals, e.g. SmCo5
057and IIIa elements, e.g. Nd2Fe14B
0571in the form of particles, e.g. rapid quenched powders or ribbon flakes
H01F 10/126
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
10Thin magnetic films, e.g. of one-domain structure
08characterised by magnetic layers
10characterised by the composition
12being metals or alloys
126containing rare earth metals
H01F 41/0293
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
41Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
02for manufacturing cores, coils, or magnets
0253for manufacturing permanent magnets
0293diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
Applicants
  • 株式会社アルバック ULVAC, INC. [JP]/[JP] (AllExceptUS)
  • 永田 浩 NAGATA, Hiroshi [JP]/[JP] (UsOnly)
  • 新垣 良憲 SHINGAKI, Yoshinori [JP]/[JP] (UsOnly)
Inventors
  • 永田 浩 NAGATA, Hiroshi
  • 新垣 良憲 SHINGAKI, Yoshinori
Agents
  • 特許業務法人エクシオ Exeo Patent & Trademark Company
Priority Data
2005-08002118.03.2005JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD OF FILM FORMATION, FILM FORMATION APPARATUS, PERMANENT MAGNET, AND PROCESS FOR PRODUCING PERMANENT MAGNET
(FR) PROCÉDÉ DE FORMATION DE FILM, APPAREIL DE FORMATION DE FILM, AIMANT PERMANENT ET PROCÉDÉ DE FABRICATION D'AIMANT PERMANENT
(JA) 成膜方法及び成膜装置並びに永久磁石及び永久磁石の製造方法
Abstract
(EN)
A film is formed at a high rate on the surface of an iron-boron-rare-earth-metal magnet having a given shape, while effectively using dysprosium or terbium as a film-forming material. Thus, productivity is improved and a permanent magnet can be produced at low cost. A permanent magnet is produced through a film formation step in which a film of dysprosium is formed on the surface of an iron-boron-rare-earth-metal magnet of a given shape and a diffusion step in which the magnet coated is subjected to a heat treatment at a given temperature to cause the dysprosium deposited on the surface to diffuse into the grain boundary phase of the magnet. The film formation step comprises: a first step in which a treating chamber where this film formation is performed is heated to vaporize dysprosium which has been disposed in this treating chamber and thereby form a dysprosium vapor atmosphere having a given vapor pressure in the treating chamber; and a second step in which a magnet kept at a temperature lower than the internal temperature of the treating chamber is introduced into this treating chamber and the dysprosium is selectively deposited on the magnet surface based on a temperature difference between the treating chamber and the magnet until the magnet temperature reaches a given value.
(FR)
L’invention concerne un film formé à une vitesse élevée à la surface d’un aimant de métal de terre rare, bore et fer ayant une forme donnée, tout en utilisant de manière effective du dysprosium ou du terbium comme matériau de formation de film. Ainsi, on augmente la productivité et l’on peut obtenir un aimant permanent à faible coût. On fabrique un aimant permanent grâce à une phase de formation de film dans laquelle un film de dysprosium est formé à la surface d’un aimant de métal de terre rare bore et fer d’une forme donnée et une phase de diffusion dans laquelle on soumet l’aimant revêtu à un traitement thermique à une température donnée pour que le dysprosium déposé à la surface se diffuse dans la phase limite de grain de l’aimant. La phase de formation de film comprend : une première phase dans laquelle on chauffe une chambre de traitement dans laquelle la formation de film a lieu, pour vaporiser le dysprosium ayant été déposé dans cette chambre de traitement et ainsi constituer une atmosphère de vapeur de dysprosium ayant une pression de vapeur donnée dans la chambre de traitement ; et une seconde phase dans laquelle on introduit un aimant maintenu à une température inférieure à la température interne de la chambre de traitement, dans cette chambre de traitement et l’on dépose le dysprosium de manière sélective à la surface de l’aimant sur la base d’une différence de température entre la chambre de traitement et l’aimant jusqu’à ce que la température de l’aimant atteigne une valeur donnée.
(JA)
成膜材料であるDy、Tbを有効に利用しつつ、所定形状鉄-ホウ素-希土類系の磁石の表面に高速で成膜させて生産性が向上し、低コストで永久磁石を製造できるようにする。所定形状の鉄-ホウ素-希土類系の磁石の表面に、Dyを成膜する成膜工程と、所定温度下で熱処理を施して表面に成膜されたDyを磁石の結晶粒界相に拡散させる拡散工程とから永久磁石を製造する。この場合、成膜工程は、この成膜工程を実施する処理室を加熱し、この処理室内に予め配置したDyを蒸発させて所定の蒸気圧を持つDy蒸気雰囲気を処理室内に形成する第一工程と、処理室内の温度より低く保持した磁石をこの処理室に搬入し、この磁石が所定温度に達するまでに、処理室内と磁石との間の温度差によって磁石表面にDyを選択的に付着堆積させる第二工程とから構成する。
Also published as
EP6729068
KR1020077018894
RU2007138551
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