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1. WO2006100842 - SHEET BODY HOLDING MECHANISM AND LITHOGRAPHY APPARATUS USING SAME

Publication Number WO/2006/100842
Publication Date 28.09.2006
International Application No. PCT/JP2006/302090
International Filing Date 07.02.2006
IPC
B65H 5/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
5Feeding articles separated from piles; Feeding articles to machines
04by movable tables or carriages
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
B65H 2406/351
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
2406Means using fluid
30Suction means
35Other elements with suction surface, e.g. plate or wall
351facing the surface of the handled material
B65H 2406/362
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
2406Means using fluid
30Suction means
36Means for producing, distributing or controlling suction
362adjusting or controlling distribution of vacuum transversally to the transport direction, e.g. according to the width of material
B65H 2701/1719
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
2701Handled material; Storage means
10Handled articles or webs
17Nature of material
171Physical features of handled article or web
1719Photosensitive, e.g. exposure, photographic or phosphor
B65H 2701/1928
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
2701Handled material; Storage means
10Handled articles or webs
19Specific article or web
1928Printing plate
B65H 5/04
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
5Feeding articles separated from piles; Feeding articles to machines
04by movable tables or carriages
B65H 5/222
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
5Feeding articles separated from piles; Feeding articles to machines
22by air-blast or suction device
222by suction devices
Applicants
  • 富士フイルム株式会社 FUJIFILM Corporation [JP]/[JP] (AllExceptUS)
  • 寺田和広 TERADA, Kazuhiro [JP]/[JP] (UsOnly)
Inventors
  • 寺田和広 TERADA, Kazuhiro
Agents
  • 千葉剛宏 CHIBA, Yoshihiro
Priority Data
2005-05919003.03.2005JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SHEET BODY HOLDING MECHANISM AND LITHOGRAPHY APPARATUS USING SAME
(FR) MECANISME DE MAINTIEN DE FEUILLES ET APPAREIL DE LITHOGRAPHIE L'UTILISANT
(JA) シート体保持機構及びそれを用いた描画装置
Abstract
(EN)
Highly accurate lithography is performed by maintaining planarity without generating a suction mark on a sheet body (F). Since a counterbore (67) for storing the head of a screw member (71) for fixing a suction plate (60) on a supporting table (58) communicates with the atmosphere through a long hole (63) and a communicating path (73), inside of the counterbore (67) is never under a negative pressure at the time of sucking the sheet body (F) through a hole section (62) of the suction plate (60), and the substrate (F) can be held by suction on the suction plate (60) by highly accurately maintaining planarity.
(FR)
La présente invention concerne un procédé de lithographie de haute précision obtenu en maintenant la planéité sans générer de marque d'aspiration sur une feuille (F). Comme un espace de lamage (67) recevant la tête d'un élément à vis (71) pour fixer une plaque à ventouse (60) sur une table de support (58) communique avec l'atmosphère par un large orifice (63) et un passage de communication (73), l'intérieur de l'espace de lamage (67) ne subit jamais de pression négative lors de l'aspiration de la feuille (F) via une ouverture (62) de la plaque à ventouse (60) et le substrat (F) peut être maintenu par aspiration sur ladite plaque (60) en conservant une planéité de haute précision.
(JA)
 シート体(F)に吸着跡が発生することがなく、平面性を維持して高精度な描画を行う。吸着プレート(60)を支持台(58)に固定するねじ部材(71)の頭部が収容される座繰り穴(67)が長孔(63)及び連通路(73)を介して大気に連通しているため、吸着プレート(60)の孔部(62)を介してシート体(F)を吸引する際に座繰り穴(67)内が負圧になることがなく、平面性を高精度に維持して基板(F)を吸着プレート(60)に吸着保持することができる。
Also published as
EP6713233
Latest bibliographic data on file with the International Bureau