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1. WO2006099453 - HIGH PERFORMANCE CCD-BASED THERMOREFLECTANCE IMAGING USING STOCHASTIC RESONANCE

Publication Number WO/2006/099453
Publication Date 21.09.2006
International Application No. PCT/US2006/009235
International Filing Date 15.03.2006
IPC
G01N 21/17 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
G01N 25/18 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analysing materials by the use of thermal means
18by investigating thermal conductivity
G06T 5/50 2006.01
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
5Image enhancement or restoration
50by the use of more than one image, e.g. averaging, subtraction
CPC
G01J 5/0003
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
0003for sensing the radiant heat transfer of samples, e.g. emittance meter
G01K 11/125
GPHYSICS
01MEASURING; TESTING
KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
11Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
12using change of colour or translucency
125using change in reflectance
G01N 2021/1731
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
1717with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
1731Temperature modulation
G01N 21/1717
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
1717with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
G01N 21/55
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
G01N 25/18
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analyzing materials by the use of thermal means
18by investigating thermal conductivity
Applicants
  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY (MIT) [US]/[US] (AllExceptUS)
  • LUEERSSEN, Dietrich [DE]/[GB] (UsOnly)
  • RAM, Rajeev, J. [US]/[US] (UsOnly)
  • HUDGINGS, Janice, A. [US]/[US] (UsOnly)
  • MAYER, Peter, M. [US]/[US] (UsOnly)
Inventors
  • LUEERSSEN, Dietrich
  • RAM, Rajeev, J.
  • HUDGINGS, Janice, A.
  • MAYER, Peter, M.
Agents
  • ENGELLENNER, Thomas
Priority Data
60/661,83215.03.2005US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) HIGH PERFORMANCE CCD-BASED THERMOREFLECTANCE IMAGING USING STOCHASTIC RESONANCE
(FR) IMAGERIE PAR THERMOREFLECTANCE DE HAUTE PERFORMANCE A BASE D'UNE CAMERA CCD UTILISANT LA RESONANCE STOCHASTIQUE
Abstract
(EN)
The invention is directed to systems and methods of digital signal processing and in particular to systems and methods for measurements of thermoreflectance signals, even when they are smaller than the code width of a digital detector used for detection. For example, in some embodiments, the number of measurements done is selected to be sufficiently large so as to obtain an uncertainty less than the code width of the detector. This allows for obtaining images having an enhanced temperature resolution. The invention is also directed to methods for predicting the uncertainty in measurement of the signal based on one or more noise variables associated with the detection process and the number of measurement iterations.
(FR)
L'invention porte sur des systèmes et sur des procédés de traitement de signaux numériques et, notamment, sur des systèmes et sur des procédés de mesure de signaux par thermoréflectance, même si ceux-ci sont inférieurs à la largeur de code d'un détecteur numérique. Par exemple, selon certains modes de mise en oeuvre, le nombre de mesures effectuées est sélectionné de façon à être suffisamment grand pour obtenir une incertitude inférieure à la largeur de code du détecteur. Ceci permet d'obtenir des images ayant une meilleure résolution de température. L'invention porte également sur des procédés de prédiction de l'incertitude de mesure du signal en fonction d'une ou de plusieurs variables de bruit associées au processus de détection et au nombre d'itérations de mesure.
Also published as
EP6738309
Latest bibliographic data on file with the International Bureau